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首页> 外文会议>Nanotechnology III; Proceedings of SPIE-The International Society for Optical Engineering; vol.6591 >Synthesis of diamond-like carbon films by pulsed laser deposition in a tiny vacuum chamber
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Synthesis of diamond-like carbon films by pulsed laser deposition in a tiny vacuum chamber

机译：在微小的真空室中通过脉冲激光沉积合成类金刚石碳膜

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摘要

Diamond like-carbon films were fabricated by pulsed laser ablation of a liquid target (vacuum oil) in a very small (volume below 1 cm~3) vacuum chamber, where the film was deposited onto the inner surface of the chamber window. The synthesis was carried out at room temperature using 248 nm KrF excimer laser. The sp~3 hybridization carbon formation was additionally promoted by gaseous H_2O_2 flow through the reaction chamber. Deposited diamond-like carbon films were characterized by Raman scattering spectroscopy, optical and atomic force microscopy. The results indicated that higher sp~3 content was present in the film areas exposed to the laser irradiation during the deposition. The surface roughness of these areas was lower compared with that of the non-irradiated areas. Optical microscopy observations indicated that the films had interference-colored regions on laser irradiated areas. These colored regions were significantly different from their surroundings, which were grey or brown. Thus, the interference-colored regions have very wide band gap (ΔE > 3 eV) and accordingly, high sp~3 hybridized carbon content.
机译：类金刚石碳膜是通过在很小的（小于1 cm〜3的体积）真空室中脉冲激光烧蚀液体靶（真空油）制成的，该膜沉积在室窗的内表面上。使用248nm KrF准分子激光在室温下进行合成。流过反应室的气态H_2O_2进一步促进了sp〜3杂化碳的形成。沉积的类金刚石碳膜通过拉曼散射光谱，光学和原子力显微镜表征。结果表明，在沉积过程中暴露于激光辐照的膜区域中存在较高的sp〜3含量。与未照射区域相比，这些区域的表面粗糙度较低。光学显微镜观察表明，该膜在激光照射的区域上具有干涉色区域。这些彩色区域与周围的灰色或棕色区域明显不同。因此，干涉色区域具有非常宽的带隙（ΔE> 3 eV），因此具有高的sp〜3杂化碳含量。

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