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首页> 外文会议>Nanotechnology VIII >Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C_2H_6O and NO_2
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Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C_2H_6O and NO_2

机译：基于单功能线的纳米传感器阵列系统选择性集成及其对C_2H_6O和NO_2的传感特性

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摘要

Nanosensors systems comprised of an array of parallel-connected single-nanowires across electrodes with finger-widths, closely related to the diameter of gas sensitive WO_3 nanowire are developed. The processing steps for the fabrication of these systems include electron-beam lithography, direct writing laser lithography, metallization, etching, dielectrophoresis, and aerosol assisted chemical vapour deposition, among others. The functionality of these systems in resistive configuration towards ethanol and nitrogen dioxide is evaluated. Results indicate higher sensor responses at 250 ℃ and less signal to noise by applying constant currents of 50 nA. For these conditions, the sensor systems demonstrate reproducible responses to each analyte, with higher response to low concentrations of nitrogen dioxide (0.2, 1, 2.5 ppm), as opposed to ethanol (2.5, 10, 100 ppm), and in line with the literature.
机译：开发了纳米传感器系统，该系统由跨电极的具有手指宽度的平行连接的单纳米线阵列组成，该宽度与气体敏感的WO_3纳米线的直径密切相关。这些系统的制造工艺步骤包括电子束光刻，直接写入激光光刻，金属化，蚀刻，介电泳以及气溶胶辅助化学气相沉积等。评估了这些系统对乙醇和二氧化氮的抵抗性功能。结果表明，通过施加50 nA恒定电流，在250℃时传感器具有更高的响应速度，而对噪声的信号更少。在这些条件下，传感器系统表现出对每种分析物的可再现响应，对低浓度的二氧化氮（0.2、1、2.5 ppm）（与乙醇（2.5、10、100 ppm）相反）具有更高的响应，并且与文献。

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  • 来源
    《Nanotechnology VIII》|2017年|102480F.1-102480F.7|共7页
  • 会议地点 Barcelona(ES)
  • 作者

    Ondrej Chmela; Jakub Sadilek; Jordi Sama; Albert Romano-Rodriguez; Jaromir Hubalek; Stella Vallejos;

  • 作者单位

    Brno University of Technology, Department of Microelectronics, Technicka 3058/10, 61600 Brno, Czech Republic ,CEITEC - Central European Institute of Technology, Brno University of Technology, Purkynova 123, 61200 Brno, Czech Republic;

    CEITEC - Central European Institute of Technology, Brno University of Technology, Purkynova 123, 61200 Brno, Czech Republic;

    Universitat de Barcelona (UB), MIND-Departament of Engineering and Institute of Nanoscience and Nanotechnology (IN2UB), c/Marti i Franques 1, E-08028 Barcelona, Spain;

    Universitat de Barcelona (UB), MIND-Departament of Engineering and Institute of Nanoscience and Nanotechnology (IN2UB), c/Marti i Franques 1, E-08028 Barcelona, Spain;

    Brno University of Technology, Department of Microelectronics, Technicka 3058/10, 61600 Brno, Czech Republic ,CEITEC - Central European Institute of Technology, Brno University of Technology, Purkynova 123, 61200 Brno, Czech Republic;

    CEITEC - Central European Institute of Technology, Brno University of Technology, Purkynova 123, 61200 Brno, Czech Republic;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    nanowires; gas nanosensor; array; nanoelectrodes;

    机译：纳米线;气体纳米传感器数组纳米电极;

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