Thermopile linear array for spectroscopy applications

机译：用于光谱学应用的热电堆线性阵列

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An uncooled linear array of 66 infrared elements has been designed, simulated, and fabricated using MEMS techniques. CMOS compatible poly-Silicon thermoelectric materials are utilized. Numerical simulations optimize the geometry and physical parameters for the thermopile materials. The pixel dimensions are 2.0 mm × 0.45 mm with 0.5 mm pitch. Excellent performance has been obtained in Nitrogen environment: D~* = 1.2 × 10~8 cm (Hz)~(1/2)/W; τ = 31 ms; and cross talk of <15 %. Measured performance is comparable to, and in some respects exceeds, the performance of thermopile linear arrays based on Bi and Sb materials. The arrays are packaged for integration with an existing dispersive infrared spectrometer.

机译：已使用MEMS技术设计，模拟和制造了由66个红外元件组成的未冷却线性阵列。使用了CMOS兼容的多晶硅热电材料。数值模拟优化了热电堆材料的几何形状和物理参数。像素尺寸为2.0毫米×0.45毫米，间距为0.5毫米。在氮气环境中获得了出色的性能：D〜* = 1.2×10〜8 cm（Hz）〜（1/2）/ W； τ= 31毫秒；串扰<15％。测得的性能与基于Bi和Sb材料的热电堆线性阵列的性能相当，并且在某些方面超过了。这些阵列经过封装，可以与现有的分散红外光谱仪集成。

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来源
《Next-generation spectroscopic technologies III》|2010年|P.76800J.1-76800J.8|共8页
会议地点 Orlando FL(US)
作者
A. Levin; W. Baer; S. Harrigan; J. Zewicke; R.S. Toth;
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作者单位

Dexter Research Center, Inc., Dexter, MI, U.S.A.;

rnDexter Research Center, Inc., Dexter, MI, U.S.A.;

rnDexter Research Center, Inc., Dexter, MI, U.S.A.;

rnDexter Research Center, Inc., Dexter, MI, U.S.A.;

rnDexter Research Center, Inc., Dexter, MI, U.S.A.;

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原文格式 PDF
正文语种 eng
中图分类光谱学;
关键词
infrared; linear array; gas spectroscopy; thermopile;

机译：红外线;线性阵列气相色谱热电堆;

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专利

1. A new high detectivity room temperature linear thermopile array with a D~* greater than 2 × 10~9 cmHz~(1/2)/W based on organic membranes [J] . Frank Haenschke, Ernst Kessler, Ulrich Dillner, Microsystem technologies . 2013,第12期

机译：基于有机膜的D〜*大于2×10〜9 cmHz〜（1/2）/ W的新型高探测室温线性热电堆阵列
2. Linear and matrix thermopile sensor arrays for detection of position, presence, and of movement [J] . W. Leneke, J. Schieferdecker, K. Storck, Technisches Messen: Sensoren, Gerate, Systeme . 1999,第3期

机译：线性和矩阵热电堆传感器阵列，用于检测位置，存在和移动
3. Uncooled thermopile infrared detector linear arrays with detectivity greater than 10/sup 9/ cmHz/sup 1/2//W [J] . Foote M.C., Jones E.W. IEEE Transactions on Electron Devices . 1998,第9期

机译：未冷却的热电堆红外探测器线性阵列，其探测率大于10 / sup 9 / cmHz / sup 1/2 // W
4. Thermopile linear array for spectroscopy applications [C] . A. Levin, W. Baer, S. Harrigan, SPIE Conference on Next-Generation Spectroscopic Technologies . 2010

机译：热电堆线性阵列，用于光谱应用
5. A SILICON-BASED THERMOPILE INFRARED DETECTOR ARRAY CONTAINING ON-CHIP READOUT CIRCUITRY. [D] . CHOL, IL HYUN. 1986

机译：基于硅的热敏红外探测器阵列，包含片上读出电路。
6. Mixed-gas CH4/CO2/CO detection based on linear variable optical filter and thermopile detector array [O] . Shaoda Zhang, Wu Bin, Binbin Xu, 2019

机译：基于线性可变光学滤波器和热电堆检测器阵列的混合气CH4 / CO2 / CO检测
7. 3.4 - Dispersive IR-Spectroscopy for harsh environment based on thermopile elements realized with TPL640 (thermopile line array) [O] . S. Biermann, P. Sachse, A. Magi, 2013

机译：3.4 - 基于TPL640实现的热电偶联元件的苛刻环境的分散IR光谱（热电偶联线阵列）
8. Analytical and Experimental Characterization of a Linear-Array Thermopile Scanning Radiometer for Geo-Synchronous Earth Radiation Budget Applications [R] . Sorensen, Ira J. 1998

机译：用于地球同步地球辐射预算应用的线阵热电堆扫描辐射计的分析和实验表征

Thermopile linear array for spectroscopy applications

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