MEMS and Piezo Actuator Based Fabry-Perot Interferometer Technologies and Applications at VTT

机译：VTT上基于MEMS和压电致动器的Fabry-Perot干涉仪技术及其应用

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Miniaturized spectrometers covering spectral regions from UV to thermal IR are of interest for several applications. For these purposes VTT has for many years been developing tuneable MEMS-based and more recently piezo-actuated Fabry-Perot Interferometers (FPIs). Lately several inventions have been made to enter new wavelengths in the VIS range and enlarge apertures of MEMS devices and also extending the wavelength range of piezo-actuated FPIs. In this paper the background and the latest FPI technologies at VTT are reviewed and new results on components and system level demonstrators are presented. The two FPI technologies are compared from performance and application point of view. Finally insight is given to the further development of next generation devices.

机译：涵盖从UV到热IR的光谱区域的小型化光谱仪对于多种应用都非常重要。为了这些目的，VTT多年来一直在开发基于MEMS的可调谐器件，以及最近使用压电驱动的Fabry-Perot干涉仪（FPI）。最近，已经做出了几项发明以进入VIS范围内的新波长并扩大MEMS器件的孔径，并扩展了压电驱动FPI的波长范围。本文回顾了VTT的背景和最新的FPI技术，并提出了有关组件和系统级演示器的新结果。从性能和应用的角度比较了这两种FPI技术。最后，我们对下一代设备的进一步开发有了深入的了解。

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来源
《Next-generation spectroscopic technologies III》|2010年|P.76800U.1-76800U.12|共12页
会议地点 Orlando FL(US)
作者
Jarkko Antila; Akseli Miranto; Jussi Maekynen; Mari Laamanen; Anna Rissanen; Martti Blomberg; Heikki Saari; Jouko Malinen;
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作者单位

VTT Technical Research Centre of Finland, P.O. Box 1000, FI-02044 VTT, Finland;

rnVTT Technical Research Centre of Finland, P.O. Box 1000, FI-02044 VTT, Finland;

rnVTT Technical Research Centre of Finland, P.O. Box 1000, FI-02044 VTT, Finland;

rnVTT Technical Research Centre of Finland, P.O. Box 1000, FI-02044 VTT, Finland;

rnVTT Technical Research Centre of Finland, P.O. Box 1000, FI-02044 VTT, Finland;

rnVTT Technical Research Centre of Finland, P.O. Box 1000, FI-02044 VTT, Finland;

rnVTT Technical Research Centre of Finland, P.O. Box 1000, FI-02044 VTT, Finland;

rnVTT Technical Research Centre of Finland, P.O. Box 1000, FI-02044 VTT, Finland;

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原文格式 PDF
正文语种 eng
中图分类光谱学;
关键词
miniaturized spectrometer; fabry-perot; MEMS; piezo; imaging; NIR; VIS;

机译：小型光谱仪法布里-珀罗MEMS;压电成像近红外;可视化;

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1. Surface stress sensor based on MEMS Fabry-Perot interferometer with high wavelength selectivity for label-free biosensing [J] . Takahashi Toshiaki, Hizawa Takeshi, Misawa Nobuo, Journal of Micromechanics and Microengineering . 2018,第5期

机译：基于MEMS法布里 - 珀罗干涉仪的表面应力传感器，具有高波长选择性的无标记生物沉积
2. Surface stress sensor using MEMS-based Fabry-Perot interferometer for label-free biosensing [J] . Kazuhiro Takahashi, Hiroki Oyama, Nobuo Misawa, Sensors and Actuators . 2013,第nova期

机译：使用基于MEMS的Fabry-Perot干涉仪的表面应力传感器可实现无标签生物传感
3. Mirror electrostatic actuation of a medium-infrared tuneable Fabry-Perot interferometer based on a surface micromachining process [J] . Sabate N, Rubio R, Calaza C, Sensors and Actuators, A. Physical . 2005,第0期

机译：基于表面微加工工艺的中红外可调谐法布里-珀罗干涉仪的镜面静电激励
4. MEMS and Piezo Actuator Based Fabry-Perot Interferometer Technologies and Applications at VTT [C] . Jarkko Antil, Akseli Miranto, Jussi Makynen, SPIE Conference on Next-Generation Spectroscopic Technologies . 2010

机译：基于MEMS和压电致动器的Fabry-Perot干涉仪技术和应用在VTT
5. Design, Simulation, Fabrication, and Characterization of MEMS-based, Tunable FABRY-PEROT Interferometer Filter in the Long Wavelength Infrared Region [D] . Kim, Tae Sung . 2019

机译：在长波长红外区域中基于MEMS的可调谐法布里 - 珀罗干涉仪滤波器的设计，仿真，制造和表征
6. New Endoscopic Imaging Technology Based on MEMS Sensors and Actuators [O] . Zhen Qiu, Wibool Piyawattanamatha 2017

机译：基于MEMS传感器和执行器的新型内窥镜成像技术
7. Electro-optic Polymer Based Fabry-Perot Interferometer Devices for Optoelectronic Applications [O] . Gan Haiyong 2008

机译：用于光电应用的基于电光聚合物的法布里-珀罗干涉仪设备

MEMS and Piezo Actuator Based Fabry-Perot Interferometer Technologies and Applications at VTT

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