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首页> 外文会议>Optical Measurement Systems for Industrial Inspection V pt.1; Proceedings of SPIE-The International Society for Optical Engineering; vol.6616 pt.1 >High-resolution tomographic interferometry of optical phase elements
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High-resolution tomographic interferometry of optical phase elements

机译：光学相位元件的高分辨率层析成像干涉术

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摘要

Decades ago tomographic interferometry was successfully applied to the measurement of phase objects in a large scale. Recently the application field was extended to nearly micro scale, for example optical fibers. Nevertheless, the geometry of tested objects was usually relatively simple and the spatial resolution at the level of several microns was always a barrier. In this paper we investigate the possibility of tomographic reconstruction of complex phase objects by means of tomographic interferometry. The analyses have been performed on the photonic crystal fiber, which is not only a highresolution object, but additionally contains periodic structures. The influences of the following factors are investigated: proper matching of the immersion liquid, mechanical imperfections of the rotation, geometry of the fiber, polarization of the illumination beam and type of reconstruction algorithm. In addition to experimental results, the numerical simulation of wavefront propagation through the fiber is performed. According to the results, the high - resolution reconstruction of the three - dimensional refractive index distribution in the object containing a periodic structure is possible, however limited by several conditions, as described in the paper.
机译：几十年前，层析X射线照相术已成功地用于大规模的相位测量。最近，应用领域已扩展到近乎微尺度，例如光纤。然而，被测物体的几何形状通常相对简单，几微米级别的空间分辨率始终是障碍。在本文中，我们研究了通过断层摄影干涉术对复杂相对象进行断层摄影的可能性。对光子晶体光纤进行了分析，该光子晶体光纤不仅是高分辨率的对象，而且还包含周期性结构。研究了以下因素的影响：浸没液体的正确匹配，旋转的机械缺陷，光纤的几何形状，照明光束的偏振和重建算法的类型。除实验结果外，还对通过光纤的波前传播进行了数值模拟。根据该结果，可以对包含周期性结构的物体中的三维折射率分布进行高分辨率重构，但是如本文中所述，受到多个条件的限制。

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