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首页> 外文会议>Optical Measurement Systems for Industrial Inspection V pt.1; Proceedings of SPIE-The International Society for Optical Engineering; vol.6616 pt.1 >Surface metrology with a stitching Shack-Hartmann profilometric head
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Surface metrology with a stitching Shack-Hartmann profilometric head

机译：带有Shack-Hartmann缝线轮廓测量头的表面计量

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摘要

In this article, a stitching Shack-Hartmann profilometric head is presented. This instrument has been developed to answer improved needs for surface metrology in the domain of short-wavelength optics (X/EUV). It is composed of a highaccuracy Shack-Hartmann wavefront sensor and an illumination platform. This profilometric head is mounted on a translation stage to perform bidimensional mappings by stitching together successive sub-aperture acquisitions. This method ensures the submicroradian accuracy of the system and allows the user to measure large surfaces with a submillimetric spatial resolution. We particularly emphasize on the calibration method of the head; this method is validated by characterizing a super-flat reference mirror. Cross-checked tests with the Soleil's long-trace profiler are also performed. The high precision of profilometric head has been validated with the characterization of a spherical mirror. We also emphasize on the large curvature dynamic range of the instrument with the measurement of an X-ray toric mirror. The instrument, which performs a complete diagnostic of the surface or wavefront under test, finds its main applications in metrology (measurement of large optics/wafers, post-polishing control and local surface finishing for the industry, spatial quality control of laser beam).
机译：本文介绍了一种可缝制的Shack-Hartmann轮廓测量头。该仪器的开发旨在满足短波长光学（X / EUV）领域对表面计量学不断提高的需求。它由高精度Shack-Hartmann波前传感器和照明平台组成。该轮廓测量头安装在平移台上，以通过将连续的子孔径采集缝合在一起来执行二维映射。这种方法确保了系统的亚微弧度精度，并允许用户以亚毫米级的空间分辨率测量大表面。我们特别强调头部的校准方法。通过表征超平坦参考镜来验证该方法。还使用Soleil的长时间跟踪分析器进行了交叉检查的测试。轮廓镜头的高精度已经通过球面镜的特性得到验证。我们还通过X射线复曲面镜的测量来强调仪器的大曲率动态范围。该仪器可对被测表面或波阵面进行全面诊断，发现其在计量学中的主要应用（大型光学/晶片的测量，工业中的抛光后控制和局部表面处理，激光束的空间质量控制）。

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