Dispersive white-light interferometry for 3-D inspection of thin-film layers of flat panel displays

机译：色散白光干涉仪，用于3-D检查平板显示器的薄膜层

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Emerging possibility of applying white-light interferometry to the area of thin-film metrology is addressed. Emphasis is given to explaining underlying spectrally-resolved interferometric principles of white-light interferometry for measuring the top surface profile as well as the thickness of thin-film layers, which enables one to reconstruct the complete 3-D tomographical view of the target surface coated with thin-film layers. Actual measurement results demonstrate that white-light interferometry in either scanning or dispersive scheme is found well suited for high speed 3-D inspection of dielectric thin-film layers deposited on semiconductor or glass substrates.

机译：解决了将白光干涉法应用于薄膜计量领域的新兴可能性。重点说明了用于测量顶表面轮廓和薄膜层厚度的白光干涉测量的潜在光谱分辨干涉原理，这使人们能够重建涂层目标表面的完整3D层析成像薄膜层。实际测量结果表明，无论是扫描方式还是分散方式的白光干涉仪都非常适合高速3-D检查沉积在半导体或玻璃基板上的介电薄膜层。

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来源
《Optical Measurement Systems for Industrial Inspection V pt.1; Proceedings of SPIE-The International Society for Optical Engineering; vol.6616 pt.1》|2007年|66160T.1-66160T.8|共8页
会议地点 Munich(DE)
作者
Young-Sik Ghim; Joonho You; Seung-Woo Kim;
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作者单位

Billionth Uncertainty Precision Engineering Group, Korea Advanced Institute of Science and Technology, Science Town, Daejeon, 305-701, South Korea;

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会议组织
原文格式 PDF
正文语种 eng
中图分类应用光学;
关键词
white-light interferometry; thin-film measurement; flat panel displays; high speed inspection; dispersive interferometry; spectrally resolved interference;

机译：白光干涉仪薄膜测量；平板显示器；高速检查；色散干涉仪频谱分辨干扰;

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专利

1. Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure [J] . Young-Sik Ghim, Seung-Woo Kim Applied optics . 2009,第4期

机译：光谱解析白光干涉仪，用于薄膜层结构的3D检查
2. Contactless Functionality Inspection of Flat-Panel-Display Pixels and Thin-Film Transistors by Capacitive Coupling [J] . Koerdel M., Alatas F., Schick A., Electron Devices, IEEE Transactions on . 2012,第12期

机译：电容耦合的平板显示器像素和薄膜晶体管的非接触式功能检查
3. Dispersive white-light spectral interferometry including the effect of thin-film for distance measurement [J] . Hlubina P, Ciprian D, Lunacek J Optik: Zeitschrift fur Licht- und Elektronenoptik: = Journal for Light-and Electronoptic . 2007,第7期

机译：色散白光光谱干涉法，包括薄膜对距离测量的影响
4. Dispersive White-light Interferometry for 3-D Inspection of Thin-film Layers of Flat Panel Displays [C] . Young-Sik Ghim, Jungjae Park, Seung-Woo Kim International Conference of the European Society for Precision Engineering and Nanotechnology vol.1; 20060528-0601; Vienna(AT) . 2006

机译：用于平板显示器薄膜层的3-D检查的色散白光干涉仪
5. Indium-Gallium-Zinc Oxide Thin-Film Transistors for Active-Matrix Flat-Panel Displays. [D] . Mahmoudabadi, Forough. 2017

机译：用于有源矩阵平板显示器的铟镓锌氧化物薄膜晶体管。
6. Symptomatic accommodative and binocular dysfunctions from the use of flat-panel displays [O] . Esteban Porcar, Juan Carlos Montalt, Álvaro M. Pons, 2018

机译：使用平板显示器的症状性调节性和双眼功能障碍
7. Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry [O] . Young-Sik Ghim, Seung-Woo Kim 2006

机译：薄膜厚度曲线及其分散白光干涉测量的折射率测量

Dispersive white-light interferometry for 3-D inspection of thin-film layers of flat panel displays

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