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首页> 外文期刊>Optik: Zeitschrift fur Licht- und Elektronenoptik: = Journal for Light-and Electronoptic >Dispersive white-light spectral interferometry including the effect of thin-film for distance measurement
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Dispersive white-light spectral interferometry including the effect of thin-film for distance measurement

机译：色散白光光谱干涉法，包括薄膜对距离测量的影响

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摘要

A spectral-domain white-light interferometric technique is used for measuring distances in a Michelson interferometer with a mirror represented by a thin-film structure (TFS) on a substrate. A fibre-optic spectrometer is employed for recording spectral interferograms that include wide wavelength range effects of dispersion in a cube beam splitter and multiple reflection within the TFS. Knowing the effective thickness of the beam splitter, its dispersion and parameters of the TFS and substrate, the positions of the second interferometer mirror are determined precisely by a least-squares fitting of the theoretical spectral interferograms to the recorded ones. We apply the technique to the beam splitter made of BK7 optical glass and to a uniform SiO2 thin film on a silicon wafer. We compare the results of the processing that include and do not include the effect of the TFS. (C) 2006 Elsevier GmbH. All rights reserved.
机译：光谱域白光干涉技术用于测量迈克尔逊干涉仪中的距离，该迈克尔逊干涉仪具有在基板上以薄膜结构（TFS）表示的镜子。光纤光谱仪用于记录光谱干涉图，其中包括立方光束分束器中色散和TFS内多次反射的宽波长范围效应。知道分束器的有效厚度，其色散以及TFS和基板的参数后，第二个干涉仪镜的位置就可以通过理论光谱干涉图与所记录的干涉图的最小二乘拟合来精确确定。我们将该技术应用于由BK7光学玻璃制成的分束器以及硅晶片上均匀的SiO2薄膜。我们比较了包含和不包含TFS效果的处理结果。 （C）2006 Elsevier GmbH。版权所有。

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