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首页> 外文会议>Optical Microlithography XI >Characterization of spatial coherence uniformity in exposure tools
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Characterization of spatial coherence uniformity in exposure tools

机译：曝光工具中空间相干一致性的特征

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Abstract: A novel technique to characterize variations of the spatial (partial) coherence $sigma across the image field in modern steppers and scanners has been developed and experimentally tested. It is based on the high sensitivity of the length L of macroscopically large diamond-shaped marks printed in photoresist to $sigma variation. Variations in the $sigma value across the image field lead to variations in the length of marks printed at different image field locations. The mark lengths are measured rapidly with high accuracy by a built-in optical system and then converted into $sigma values using the calibration dependence L($sigma@) measured in the same exposure tool. Simulation and experimental studies show that the level of projection lens aberrations in modern Nikon tools have practically no effect on $sigma measurements obtained with this technique. Our results demonstrate that in the conventional illumination scheme, $sigma distribution can be measured with an accuracy of 2.5%. The main advantage of the presented method is that $sigma variation over the image field is characterized by the exposure tool itself, avoiding expensive and time-consuming SEM measurements. Moreover, since the measurement procedure is based on the wedge-shaped marks and laser scanning system currently used in Nikon tools for automated focus detection, implementation of the technique does not require any hardware or software modification. !6
机译：摘要：已开发出一种新颖的技术来表征现代步进器和扫描仪中整个图像场的空间（部分）相干性σs的变化，并进行了实验测试。这是基于在光刻胶中印刷的宏观大菱形标记的长度L对σ变化的高度敏感性。 $ sigma值在整个像场中的变化会导致在不同像场位置上打印的标记长度的变化。标记长度通过内置的光学系统以高精度快速测量，然后使用在同一曝光工具中测量的校准依赖性L（$ sigma @）转换为$ sigma值。仿真和实验研究表明，现代尼康工具中的投影镜头像差水平实际上对使用此技术获得的$ sigma测量值没有影响。我们的结果表明，在常规照明方案中，可以以2.5％的精度测量$ sigma分布。所提出的方法的主要优点是，在图像场上的$ sigma变化由曝光工具本身来表征，从而避免了昂贵且费时的SEM测量。此外，由于测量程序基于尼康工具中当前用于自动焦点检测的楔形标记和激光扫描系统，因此该技术的实现不需要任何硬件或软件修改。 ！6

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