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New projection optical system for beyond 150-nm patterning with KrF and ArF sources

机译：使用KrF和ArF光源进行超过150 nm图案化的新型投影光学系统

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Abstract: Two types of new optical system for 150 nm lithography are studied. One is the system with KrF source and high numerical aperture (NA), the other is the system with ArF source. By aerial image simulation, the adequate NA of each projection lens is searched, and the value was 0.68 for KrF source and 0.60 for ArF source. Then the projection lens is fabricated and evaluated. The results are almost same as those of simulation. !2

机译：摘要：研究了两种新型的150 nm光刻光学系统。一个是带有KrF源和高数值孔径（NA）的系统，另一个是带有ArF源的系统。通过航拍图像模拟，搜索每个投影透镜的合适的NA，KrF源的值为0.68，ArF源的值为0.60。然后，制造并评估投影透镜。结果几乎与仿真结果相同。！2

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来源
《Optical Microlithography XI》|1998年|p.414-422|共9页
会议地点 Santa Clara CA(US)
作者
Shigeru Hirukawa; Nikon Corp.; Shinagawa-ku; Tokyo; Japan; Koichi Matsumoto; Nikon Corp.; Shinagawa-ku Tokyo; Japan; Kengo Takemasa; Nikon Corp.; Kumagaya-shi Saitama; Japan.;
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正文语种 eng
中图分类轻工业、手工业;
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专利

1. Photoinduced optical absorption and 400-nm luminescence in low-germanium-content optical fiber preforms irradiated with ArF and KrF excimer-laser light [J] . Allard IB, Albert J, Brebner JL, Optics Letters . 1997,第11期

机译：ArF和KrF受激准分子激光辐照的低锗含量光纤预制棒中的光诱导光吸收和400 nm发光
2. Pattern Transfer Process Using Spun-on Carbon Film for KrF and ArF Lighography [J] . Yasuhiko Sato, Eishi Shiobara, Kentaro Matsunaga, Journal of Photopolymer Science and Technology . 2001,第3期

机译：使用旋转碳膜进行KrF和ArF光刻的图案转印工艺
3. Photoluminescence excited by ArF and KrF lasers and optical absorption of stishovite mono-crystal [J] . Trukhin AN, Dyuzheva TI, Lityagina LM, Journal of Physics. Condensed Matter . 2008,第17期

机译：ArF和KrF激光激发的光致发光和辉石单晶的光吸收
4. New projection optical system for beyond 150-nm patterning with KrF and ArF sources [C] . Shigeru Hirukawa, Koichi Matsumoto, Kengo Takemasa Conference on optical microlithography . 1998

机译：具有KRF和ARF源超过150nm的新投影光学系统
5. Intracortical sensorimotor projections in the rodent: Patterns of connectivity and functional dynamics within the vibrissa sensorimotor system [D] . Donovan, Mary Rocco 2008

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6. zOPT: an open source optical projection tomography systemand methods for rapid 3D zebrafish imaging [O] . Hanqing Zhang, Laura Waldmann, Remy Manuel, 2020

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7. Accuracy limitations introduced by digital projection sources in profilometric optical metrology systems [O] . Baker, Matthew J, Chicharo, Joe F, Xi, Jiangtao, 2004

机译：轮廓测量光学计量系统中数字投影源引入的精度限制
8. Large area projection liquid-crystal video display system with inherent grid pattern optically removed [R] . 1992

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New projection optical system for beyond 150-nm patterning with KrF and ArF sources

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