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Modeling particle distributions for stray light analysis

机译:为杂散光分析建模粒子分布

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摘要

As a result, the CL (Cleanliness Level) nomenclature actually counters effective communication and modeling of particulate contamination scatter. An analysis method and communication standard centered on Percent Area Coverage (PAC) and particle distribution slope is presented that improves the ability of Contamination Engineering and Stray Light Engineering to tackle ever more difficult instrument stray light requirements in the most cost-effective manner. Modeling the expected particle distributions for multiple contamination species improves accuracy and reduces costly overdesign.
机译:结果,CL(清洁度等级)术语实际上抵消了颗粒物污染散布的有效沟通和建模。提出了一种以面积百分比(PAC)和颗粒分布斜率为中心的分析方法和通信标准,从而提高了污染工程和杂散光工程以最经济高效的方式解决日益困难的仪器杂散光要求的能力。对多种污染物质的预期颗粒分布进行建模可提高准确性并减少昂贵的过度设计。

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