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首页> 外文会议>Optics for EUV, x-ray, and gamma-ray astronomy VII >High-efficiency blazed transmission gratings for high-resolution soft x-ray spectroscopy
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High-efficiency blazed transmission gratings for high-resolution soft x-ray spectroscopy

机译：用于高分辨率软X射线光谱学的高效闪耀透射光栅

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High-resolution spectroscopy of astrophysical sources is the key to gaining a quantitative understanding of the history, dynamics, and current conditions of the cosmos. A large-area (＞ 1,000 cm~2), high resolving power (R = λ/Δλ ＞ 3000) soft x-ray grating spectrometer (XGS) that covers the lines of C, N, O, Ne and Fe ions is the ideal tool to address a number of high-priority science questions from the 2010 Decadal Survey, such as the connection between super-massive black holes and large-scale structure via cosmic feedback, the evolution of large-scale structure, the behavior of matter at high densities, and the conditions close to black holes. While no grating missions or instruments are currently approved, an XGS aboard a potential future X-ray Surveyor could easily surpass the above performance metrics. To improve the chances for future soft x-ray grating spectroscopy missions or instruments, grating technology has to progress and advance to higher Technology Readiness Levels (TRLs). To that end we have developed Critical-Angle Transmission (CAT) gratings that combine the advantages of blazed reflection gratings (high efficiency, use of higher diffraction orders) with those of conventional transmission gratings (low mass, relaxed alignment tolerances and temperature requirements, high transparency at higher energies). A CAT grating-based spectrometer can provide performance 1-2 orders of magnitude better than current grating instruments on Chandra and Newton-XMM with minimal resource requirements. At present we have fabricated large-area freestanding CAT gratings with narrow integrated support structures from silicon-on-insulator wafers using advanced lithography and a combination of deep reactive-ion and wet etching. Our latest x-ray test results show record high absolute diffraction efficiencies in blazed orders in excess of 30% with room for improvement.
机译：天体物理学的高分辨率光谱学是对宇宙的历史，动力学和当前状况进行定量了解的关键。覆盖C，N，O，Ne和Fe离子线的大面积（＞ 1,000 cm〜2），高分辨力（R =λ/Δλ＞ 3000）软X射线光栅光谱仪（XGS）是理想的工具，可以解决2010年年代际调查中的许多高优先级科学问题，例如，超大质量黑洞与宇宙反馈之间的大型结构之间的联系，大型结构的演化，物质的行为高密度，条件接近黑洞。尽管目前没有批准任何光栅任务或仪器，但潜在的未来X射线测量仪上的XGS可以轻松超越上述性能指标。为了增加将来进行软X射线光栅光谱学任务或仪器的机会，光栅技术必须进步并提高到更高的技术准备水平（TRL）。为此，我们开发了临界角透射（CAT）光栅，该光栅结合了闪耀反射光栅的优势（高效率，使用更高的衍射级）与常规透射光栅的优势（质量轻，对准公差和温度要求宽松，温度高，高能量下的透明性）。基于CAT光栅的光谱仪可以以最低的资源需求提供比Chandra和Newton-XMM上的当前光栅仪器高1-2个数量级的性能。目前，我们已使用先进的光刻技术以及深反应离子和湿法刻蚀的组合，从绝缘体上硅晶片制造了具有狭窄集成支撑结构的大面积独立式CAT光栅。我们最新的X射线测试结果显示，创纪录的超高绝对衍射效率超过30％，并且还有改进的空间。

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