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Controlling the shapes of coated silicon substrates via magnetic fields, a progress report

机译:通过磁场控制涂层硅基板的形状,进度报告

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摘要

We describe our progress in developing a method for correcting residual figure errors in X-ray mirrors. The technology has applications to both synchrotron radiation beamlines and X-ray astronomy. Our concept is to develop mirrors that are on the order of a millimeter thick. A magnetic smart material (MSM) is deposited onto the mirror substrate (silicon) and coated with a magnetically hard material. The shape of the mirror can be controlled by applying an external magnetic field to the mirror. This causes the MSM to expand or contract, thereby applying a magnetostrictive stress to the mirror and changing its shape. The shape change is maintained after the field has been removed by the magnetic hard material, which retains part of the field and prevents the MSM from relaxing. Here we present the results of shaping 200 μm thick silicon (100) 14 × 2 mm cantilevers and 50 × 50 × 0.1 mm substrates. We demonstrate that not only can a sizable deflection be created, but it can also be retained for ~ 60 hours.
机译:我们描述了在开发校正X射线镜中残留图形误差的方法方面的进展。该技术可应用于同步加速器辐射束线和X射线天文学。我们的概念是开发厚度大约为毫米的镜子。磁性智能材料(MSM)沉积在反射镜基板(硅)上,并涂有硬磁性材料。镜子的形状可以通过向镜子施加外部磁场来控制。这导致MSM膨胀或收缩,从而向反射镜施加磁致伸缩应力并改变其形状。在通过硬磁材料去除磁场之后,形状保持不变,这保留了磁场的一部分并防止MSM松弛。在这里,我们介绍了对200μm厚的硅(100)14×2 mm悬臂和50×50×0.1 mm基板进行整形的结果。我们证明,不仅会产生较大的挠度,而且还能保持约60小时。

著录项

  • 来源
    《Optics for EUV, x-ray, and gamma-ray astronomy VIII》|2017年|103991N.1-103991N.12|共12页
  • 会议地点 San Diego(US)
  • 作者单位

    Dept. of Physics Astronomy and CIERA, 2131 Tech Drive, Northwestern University,Evanston, IL 60208-2900 USA;

    Dept. of Physics Astronomy and CIERA, 2131 Tech Drive, Northwestern University,Evanston, IL 60208-2900 USA;

    Materials Research Science and Engineering Center, Northwestern University, Technological Institute, 2145 Sheridan Rd., K111 Evanston, IL, 60208, USA;

    Dept. of Mechanical Engineering, 2145 Sheridan Rd, Northwestern University, Evanston, IL 60208-3111 USA;

    Dept. of Mechanical Engineering, 2145 Sheridan Rd, Northwestern University, Evanston, IL 60208-3111 USA,School of Auomotive Engineering, Wuhan Univeristy of Technology, 205 Luoshi Road,Wuhan, 430070, China;

    Dept. of Physics, 825 West Dickson Street, University of Arkansas, Fayetteville, AR, 72701,USA,Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439 USA;

    Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439 USA;

    Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439 USA;

    Dept. of Mechanical Engineering, 2145 Sheridan Rd, Northwestern University, Evanston, IL 60208-3111 USA;

    Dept. of Physics Astronomy and CIERA, 2131 Tech Drive, Northwestern University,Evanston, IL 60208-2900 USA;

    Department of Physics, 77 Massachusetts Institute of Technology, 77 Massachusetts Ave,Cambridge, MA 02139, USA;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    X-ray optics; magnetic smart materials; grazing incidence optics;

    机译:X射线光学;磁性智能材料掠入射光学;

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