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Large format x-ray image detector of high resolution and sensitivity

机译：具有高分辨率和灵敏度的大幅面X射线图像检测器

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摘要

X-ray phase contrast imaging technique that can be used as a practical diagnostic tool for medical purposes requires the image detector of higher resolution and sensitivity, and of larger format as well. The above mentioned parameters cannot be come to their best on one detector at present, so there is some kind of compromise among these parameters, for example, improving one parameter may be at the cost of impairing another one. This paper designed an x-ray image detector composed of a structured scintillation screen, optic taper and CCD camera etc. Photo-assisted electrochemical etching method was used to make an array of deep holes in the crystal silicon. The scintillator (CsI:TI) was molten into the deep holes after the silicon wafer had been heat-oxidized. When the screen was coupled with CCD camera by optic taper, the detector fabrication was finished. We use the detector and an x-ray tube of 1mm focal spot to image a test pattern, the spatial resolution better than 201p/mm was obtained under the x-ray tube voltage of 45kVp and current of 2mA. The total image pixel of this detector is 2048 x 2048, with the 13.5 micrometer pixel size of the camera. The ratio of the input face size of optic taper to output size was 2:1. High sensitivity was implemented by the course of x-rays in the scintillator, the longer the course, the more the x-ray was absorbed, and the higher the sensitivity. In our detector scintillation screen, the depth of the holes was great than 150 micrometers, with the 1.5 micrometers side length of the square section of a hole.
机译：可用作医学目的的实用诊断工具的X射线相衬成像技术需要具有更高分辨率和灵敏度以及更大格式的图像检测器。目前，上述参数无法在一个检测器上达到最佳状态，因此这些参数之间存在某种折衷，例如，改进一个参数可能会损害另一参数。本文设计了一种由结构化的闪烁屏，光学锥度和CCD相机等组成的X射线图像检测器。采用光辅助电化学刻蚀方法在晶体硅中形成深孔阵列。在硅晶片被热氧化之后，将闪烁体（CsI：TI）熔化到深孔中。当屏幕通过光学锥度与CCD摄像机耦合时，检测器的制造就完成了。我们使用探测器和焦点为1mm的X射线管对测试图案成像，在45kVp的X射线管电压和2mA的电流下获得的空间分辨率优于201p / mm。该探测器的总图像像素为2048 x 2048，相机的像素大小为13.5微米。光学锥度的输入面尺寸与输出尺寸的比例为2：1。通过闪烁器中的X射线路线实现了高灵敏度，路线越长，吸收的X射线就越多，灵敏度也越高。在我们的探测器闪烁屏幕中，孔的深度大于150微米，孔的方形截面的边长为1.5微米。

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  • 来源
    《Optics in health care and biomedical optics IV》|2010年|p.78452M.1-78452M.9|共9页
  • 会议地点 Beijing(CN)
  • 作者

    Guo Jinchuan; Zhou Bin; liu Xin; Lei Yaohu; Yang Qiang;

  • 作者单位

    Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, Shenzhen University, Shenzhen 518060, China;

    Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, Shenzhen University, Shenzhen 518060, China;

    Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, Shenzhen University, Shenzhen 518060, China;

    Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, Shenzhen University, Shenzhen 518060, China;

    Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, Shenzhen University, Shenzhen 518060, China;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 光、激光生物医学;
  • 关键词

    x-ray conversion screen; photo-assisted electrochemical etching; aspect ratio; silicon; resolution; sensitivity; deep hole arrays; filling;

    机译：X射线转换屏幕；光辅助电化学蚀刻长宽比硅;解析度;灵敏度;深孔阵列；填充;
  • 入库时间 2022-08-26 13:44:48

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