IMPROVED DESIGN OF LARGE 3-D MICRO MIRRORS FOR MICROASSEMBLY INTO AN OPTICAL MEMS CROSS-CONNECT

机译：用于将微组件微装配到光学MEMS交叉连接中的大型3-D微镜的改进设计

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A robotic-based microassembly process has been successfully applied to the construction of a novel micromirror design for use in optical switching. This paper is devoted to the description of a modified microassembly technique to construct a 3-D rotating inclined micromirror (3DRIM) that incorporate large micromirrors. The microassembly process is based upon the PMKIL (Passive Microgripper, Key and Inter-Lock) assembly system. The new modified assembly technique uses three supporting microparts: Two support posts and one cross-support post. Details of the assembly process to construct the micromirror and the design of the microparts are described. The results of the assembly process are presented, along with examples of prototype 3DRIMs. The 3DRIM is used as a building element for 1 × N optical switching systems and for N × M optical cross-connects.

机译：基于机器人的微装配过程已成功应用于光开关中新型微镜设计的构建。本文致力于描述一种改进的微装配技术，以构建包含大型微镜的3-D旋转倾斜微镜（3DRIM）。微型装配过程基于PMKIL（被动微型夹具，钥匙和互锁）装配系统。经过改进的新装配技术使用了三个支撑微零件：两个支撑柱和一个交叉支撑柱。描述了构造微镜的组装过程和微零件设计的细节。介绍了组装过程的结果，以及原型3DRIM的示例。 3DRIM用作1×N光学交换系统和N×M光学交叉连接的构建元件。

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来源
《Optomechatronic Micro/Nano Devices and Components III; Proceedings of SPIE-The International Society for Optical Engineering; vol.6717》|2007年|P.17.1-17.10|共10页
会议地点 Lausanne(CH)
作者
Mohamed A. Basha; Nikolai Dechev; Safieddin Safavi-Naeini; Sujeet K. Chaudhuri;
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作者单位

Electrical Computer Engineering, University of Waterloo, 200 University Ave. West, Waterloo, Ontario, Canada N2L 3G1;

Mechanical Engineering, University of Victoria, PO Box 3055, Victoria, BC, Canada, V8W 3P6;

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原文格式 PDF
正文语种 eng
中图分类光电子技术、激光技术;
关键词
micromotor; 3DRIM; microassembly; 3-D microstructure; MEMS;

机译：微电机; 3DRIM;微组件; 3-D微结构; MEMS;

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1. Amulti-chip directly mounted 512-MEMS-mirror array module with a hermetically sealed package for large optical cross-connects [J] . Mi XY, Soneda H, Okuda H, Journal of optics, A. Pure and applied optics: journal of the European Optical Society . 2006,第7期

机译：多芯片直接安装的512-MEMS镜阵列模块，具有用于大型光学交叉连接的密封封装
2. Optical Performance of Variable Attenuation in Large-Scale 3-D MEMS-Based Photonic Cross-Connects [J] . Volkan Kaman, Shifu Yuan, Jim Klingshirn, IEEE Photonics Technology Letters . 2005,第9期

机译：基于大规模3D MEMS的光子交叉连接中可变衰减的光学性能
3. Novel MEMS L-switching matrix optical cross-connect architecture: design and analysis-optimal and staircase-switching algorithms [J] . Yeow J.T.W., Abdallah S.S. Journal of Lightwave Technology . 2005,第10期

机译：新型MEMS L开关矩阵光学交叉连接架构：设计和分析-最佳和阶梯开关算法
4. IMPROVED DESIGN OF LARGE 3-D MICRO MIRRORS FOR MICROASSEMBLY INTO AN OPTICAL MEMS CROSS-CONNECT [C] . Mohamed A Basha, Nikolai Dechev, Safieddin Safavi-Naeini, Conference on Optomechatronic Micro/Nano Devices and Components . 2007

机译：改进的大型3-D微镜设计为微型装配到光学MEMS交叉连接
5. Design, fabrication and parallel control of distributed systems of stress-engineered MEMS microrobots for microassembly. [D] . Paprotny, Igor. 2008

机译：用于微型装配的应力工程MEMS微型机器人的分布式系统的设计，制造和并行控制。
6. Three-beam Doppler optical coherence tomography using a facet prism telescope and MEMS mirror for improved transversal resolution [O] . R. Haindl, W. Trasischker, B. Baumann, -1

机译：使用小棱镜棱镜和MEMS反射镜的三光束多普勒光学相干断层扫描技术可提高横向分辨率
7. Automated microassembly of surface MEMS mirrors by centrifugal force [O] . King W. C. Lai, P. S. Chung, Ming Li, 2008

机译：通过离心力自动微组装表面MEMS反射镜
8. Demonstrating Optical Aberration Correction With a Mems Micro-Mirror Device [R] . Hick, S. R. 1996

机译：使用mems微镜装置演示光学校正校正

IMPROVED DESIGN OF LARGE 3-D MICRO MIRRORS FOR MICROASSEMBLY INTO AN OPTICAL MEMS CROSS-CONNECT

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