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首页> 外文会议>Photonics for solar energy systems III >Amorphous SiC Layers for Electrically Conductive Rugate Filters in Silicon Based Solar Cells
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Amorphous SiC Layers for Electrically Conductive Rugate Filters in Silicon Based Solar Cells

机译：硅基太阳能电池中导电Rugate滤光片的非晶SiC层

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摘要

The subject of this work is the development of an electrically conductive Rugate filter for photovoltaic applications. We believe that the optical as well as the electrical performance of the filter can be adapted especially to the requirements of crystalline Si thin-film and amorphous/crystalline silicon tandem solar cells. We have deposited amorphous hydrogenated silicon carbide layers (a-Si_xC_(1-x):H) with the precursor gases methane (CH_4), silane (SiH_4) and diborane (B_2H_6) by applying Plasma Enhanced Chemical Vapour Deposition (PECVD). By variation of the precursor flows, a floating refractive index n from 1.9 to 3.5 (at 633 nm) could be adjusted quite accurately. Different complex layer stacks (up to 200 layers) with a sinusoidal refractive index variation normal to the incident light were deposited in just 80 min on an 100×100 mm~2 area. Transmission measurements show good agreement between simulation and experiment, which proves our ability to control the deposition process, the good knowledge of the optical behaviour of the different SiC single layers and the advanced stage of our simulation model. The doped single layers show lateral conductivities that were extremely dependent on the Si/C ratio.
机译：这项工作的主题是开发用于光伏应用的导电Rugate滤波器。我们认为，滤光器的光学性能和电气性能可以特别适应晶体硅薄膜和非晶/晶体硅串联太阳能电池的要求。我们已经通过应用等离子体增强化学气相沉积（PECVD）与前驱物气体甲烷（CH_4），硅烷（SiH_4）和乙硼烷（B_2H_6）沉积了非晶态氢化碳化硅层（a-Si_xC_（1-x）：H）。通过改变前驱物的流量，可以非常精确地调节从1.9到3.5（在633 nm）的浮动折射率n。仅在80分钟内在100×100 mm〜2的面积上沉积了具有垂直于入射光的正弦折射率变化的不同复合层堆叠（最多200层）。透射测量结果显示出模拟与实验之间的良好一致性，这证明了我们控制沉积过程的能力，对不同SiC单层光学行为的充分了解以及模拟模型的高级阶段。掺杂的单层显示出极大地依赖于Si / C比的横向电导率。

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  • 来源
    《Photonics for solar energy systems III》|2010年|P.77250l.1-77250l.8|共8页
  • 会议地点 Brussels(BE)
  • 作者

    S. Janz; M. Peters; M. Kuenle; R. Gradmann; D. Suwito;

  • 作者单位

    Fraunhofer Institute for Solar Energy Systems, Heidenhofstrasse 2, 79110 Freiburg, Germany;

    rnFraunhofer Institute for Solar Energy Systems, Heidenhofstrasse 2, 79110 Freiburg, Germany;

    rnFraunhofer Institute for Solar Energy Systems, Heidenhofstrasse 2, 79110 Freiburg, Germany;

    rnFraunhofer Institute for Solar Energy Systems, Heidenhofstrasse 2, 79110 Freiburg, Germany;

    rnFraunhofer Institute for Solar Energy Systems, Heidenhofstrasse 2, 79110 Freiburg, Germany;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 应用光学;太阳能技术;
  • 关键词

    rugate filter; silicon carbide; photovoltaics;

    机译：皱褶过滤器；碳化硅光伏;

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