In-situ measurements of surface characteristics can deliver very helpful informations for the process control, so that process parameters can be adjusted directly during the fabrication process. The requirements are dependent on the field of application. For the applications of ultra precise surfaces, e.g. micro structured or continuous optical components, interferometric form testing may be suited, because of its very high accuracy and flexibility. Furthermore with interferometry the surfaces can be measured very fast, which leads to a reduced production time. However, a disadvantage may be the sensitivity of interferometric systems to external influences, like machine vibrations, noise or air turbulences. Due to this reason, it is very difficult to perform interferometric measurements within a production environment. In this paper we present interferometric measurements in the manufacturing machine environment and simulation based results of the analysis of fundamental influences on interferometers operated in-situ.
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