One kind of interferometry of roughness parameter Rz of smooth surface is introduced ,which observes the equal thickness interference fringes by the way that upper surface of the air film is parallel to the datum plane of the surface of a sample ,and judges peeks and valleys of the surface of a sample by relative motion between interference fringes .A new computational formula of Rz is also given .The method in this paper is simple in measuring process and undemanding on measuring instruments .At the same time ,this method is helpful to surface microcosmic profile analysis of a sample .%介绍了一种光滑表面粗糙度Rz 参数的干涉测量法。该方法用空气膜层上表面与样本表面的基准面平行的方式来观察等厚干涉条纹，用干涉条纹间的相对运动来判断样本表面的峰谷，同时也给出了新的 Rz 计算公式。该方法测量过程较简单、对仪器要求较低且有助于样本的表面微观形貌分析。
展开▼
