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Ohmic contacts to n-type GaSb grown on GaAs by the Interfacial Misfit Dislocation technique

机译:通过界面失配位错技术与在GaAs上生长的n型GaSb的欧姆接触

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摘要

Low resistance ohmic contacts have been successfully fabricated on n-GaSb layers grown by MBE on semi-insulating (SI) GaAs substrates using the Interfacial Misfit Dislocation (IMF) technique. Although intended for photovoltaic applications, the results are applicable to many antimonide-based devices. The IMF technique enables the growth of epitaxial GaSb layers on semi-insulating GaAs substrates resulting in vertical current confinement not possible on unintentionally doped ~ 1e17 cm~(-3) p-doped bulk GaSb. Results for low resistance ohmic contacts using NiGeAu, PdGeAu, GeAuNi and GeAuPd metallizations for various temperatures are reported. Specific transfer resistances down to 0.12 Ω-mm and specific contact resistances of < 2e-6 Ω-cm~2 have been observed.
机译:低电阻欧姆接触已成功通过界面错配(IMF)技术在由MBE在半绝缘(SI)GaAs衬底上生长的n-GaSb层上制造。尽管打算用于光伏应用,但结果可应用于许多基于锑的设备。 IMF技术可以在半绝缘GaAs衬底上生长外延GaSb层,从而导致无意掺杂〜1e17 cm〜(-3)p掺杂的块状GaSb时无法进行垂直电流限制。报道了在各种温度下使用NiGeAu,PdGeAu,GeAuNi和GeAuPd金属镀层进行低电阻欧姆接触的结果。观察到比传输电阻低至0.12Ω-mm,比接触电阻<2e-6Ω-cm〜2。

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  • 会议地点 San Francisco CA(US)
  • 作者单位

    Center for High Technology Materials, University of New Mexico, 1313 Goddard SE, Albuquerque, NM, USA 87106;

    Center for High Technology Materials, University of New Mexico, 1313 Goddard SE, Albuquerque, NM, USA 87106;

    Center for High Technology Materials, University of New Mexico, 1313 Goddard SE, Albuquerque, NM, USA 87106;

    Virginia Polytechnic Institute and State University, 910 Drillfield Drive, Blacksburg, VA, USA 24061;

    The State University of New York at Geneseo, 1 College Circle, Geneseo, NY, USA 14454;

    Center for High Technology Materials, University of New Mexico, 1313 Goddard SE, Albuquerque, NM, USA 87106;

    Center for High Technology Materials, University of New Mexico, 1313 Goddard SE, Albuquerque, NM, USA 87106;

    Center for High Technology Materials, University of New Mexico, 1313 Goddard SE, Albuquerque, NM, USA 87106;

    Center for High Technology Materials, University of New Mexico, 1313 Goddard SE, Albuquerque, NM, USA 87106;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Ohmic contacts; GaSb; GaAs; Interfacial Misfit Dislocation; TLM pattern; Specific contact resistance;

    机译:欧姆接触;砷化镓;砷化镓;界面错位脱位; TLM模式;比接触电阻;

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