首页> 外文会议>Proceedings of the 1999 workshop on polymeric materials for microelectronics and photonics applications : Mechanics, physics, reliability, processing >Manufacturing of continuous surface-relief plastic DOEs using high-precision milling machine process with ruling diamond
【24h】

Manufacturing of continuous surface-relief plastic DOEs using high-precision milling machine process with ruling diamond

机译:使用带标尺的高精度铣床工艺制造连续浮雕塑料DOE

获取原文
获取原文并翻译 | 示例

摘要

Lithography is a common process to manufacture diffractive optical elements (DOEs). Yet this is not a cost-effective method due to its batch nature of the proces and also due to the necessity to use multi-level maskings in case of continuous surface relief gratings. We used a high-precision milling machine which operates at 10nm steps for x, y, and z directions and manufactured acrylic plastic DOEs as well as precision molds to produce such DOEs cost-effectively. One of such DOEs is grating with the period of 376#mu#m and the peak depth of 1.29#mu#m, whose diffraction has a fan-out beam splitting characteristics. We present scalar- and vector-theory simulations of its behaviors in terms of grating efficiencies (which go as high as 94
机译:光刻是制造衍射光学元件(DOE)的常用方法。然而,由于其过程的批处理性质,并且由于在连续表面起伏光栅的情况下必须使用多级掩膜,因此这不是一种经济有效的方法。我们使用了一台高精度铣床,在x,y和z方向上以10nm的步距运行,并制造了丙烯酸塑料DOE和精密模具,以经济高效地生产了此类DOE。这种DOE之一是周期为376#mu#m且峰值深度为1.29#mu#m的光栅,其衍射具有扇出光束分裂特性。我们以光栅效率(高达94的效率)对它的行为进行标量和矢量理论模拟

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号