Wafer-level vacuum-encapsulated ultra-low voltage tuning fork MEMS resonator

著录项

• 来源
  《Proceedings of the 2016 IEEE National Aerospace and Electronics Conference》|2016年|333-337|共5页
• 会议地点 Dayton(US)
• 作者

  Junjun Huan; George Xereas; Vamsy P. Chodavarapu;

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• 作者单位

  Department of Electrical and Computer Engineering, University of Dayton, 300 College Park, Dayton, Ohio, 45469, USA;

  Department of Electrical and Computer Engineering, McGill University, 3480 University Street, Montreal, QC, H3A 0E9 Canada;

  Department of Electrical and Computer Engineering, University of Dayton, 300 College Park, Dayton, Ohio, 45469, USA;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  Oscillators; Micromechanical devices; Electrodes; Vibrations; Resonant frequency; Resistance; Operational amplifiers;

  机译：振荡器;微机械设备;电极;振动;谐振频率;电阻;运算放大器;