Piezoresistive bridge configuration for a atomic force microscopy

机译：原子力显微镜的压阻电桥配置

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

The piezoresistive sensor component is directly integrated on a cantilever taken from te production of the Nanosensors company. It consists of four implanted semiconductor resistors which are connected to form a bridge .An optimisation of the process parameters has bee nmade to achieve ultimate sensitivity. Finally, investigations on gold-clusters wih piezoresistive sensors are presented.

机译：压阻传感器组件直接集成在从Nanosensors公司生产的悬臂上。它由四个植入的半导体电阻器组成，这些电阻器连接在一起以形成一个桥。已经进行了工艺参数的优化，以实现最高的灵敏度。最后，介绍了带有压阻传感器的金簇的研究。

著录项

来源
《Proceedings of the 27th European solid-state device research conference》|1997年|p.680-682|共3页
会议地点 Stuttgart(DE);Stuttgart(DE)
作者
RMJumpertz; A.Van der Hart; J.Schelten; O.Ohlsson; Th.Sulzbach; F.Saurenbach;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
关键词

相似文献

外文文献
中文文献
专利

1. Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes [J] . R. Pedrak, Tzv. Ivanov, K. Ivanova, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structure . 2003,第6期

机译：具有集成压阻传感器和热双压电晶片执行器的微机械原子力显微镜传感器，用于高本征模式下的高速攻丝模式原子力显微镜相位成像
2. Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge arrangement [J] . Thaysen J., Hansen O., Bouwstra S., Sensors and Actuators, A. Physical . 2000,第1a3期

机译：具有压阻读数和高度对称惠斯通电桥装置的原子力显微镜探头
3. Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge arrangement [J] . J. Thaysen, A. Boisen, O. Hansen Sensors and Actuators, A. Physical . 2000,第1a3期

机译：具有压阻读数和高度对称惠斯通电桥装置的原子力显微镜探头
4. Piezoresistive bridge configuration for a atomic force microscopy [C] . RMJumpertz, A.Van der Hart, J.Schelten, European solid-state device research conference . 1997

机译：用于原子力显微镜的压阻性桥梁配置
5. Advances in piezoresistive probes for atomic force microscopy. [D] . Harley, Jonah Alexander. 2000

机译：原子力显微镜的压阻探针的进展。
6. Atomic Structures of Silicene Layers Grown on Ag(111): Scanning Tunneling Microscopy and Noncontact Atomic Force Microscopy Observations [O] . Andrea Resta, Thomas Leoni, Clemens Barth, -1

机译：Ag（111）上生长的硅层的原子结构：扫描隧道显微镜和非接触式原子力显微镜观察。
7. Piezoresistive properties of carbon nanotubes under radial force investigated by atomic force microscopy [O] . Nishio Taichi, Miyato Yuji, Kobayashi Kei, 2008

机译：原子力显微镜研究径向力作用下碳纳米管的压阻特性
8. Atomic Force MIcroscopy and Scanning Tunneling Microscopy with a Combination Atomic Force Microscope/Scanning Tunneling Microscopy [R] . Marti, O., Drake, B., Gould, S., 1988

机译：原子力显微镜和扫描隧道显微镜与组合原子力显微镜/扫描隧道显微镜

Piezoresistive bridge configuration for a atomic force microscopy

摘要

著录项

相似文献

相关主题

期刊订阅