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Stress Induced Leakage Current Dependence on Oxide Thickness, Technology and Stress Level

机译:应力引起的漏电流取决于氧化物厚度,工艺和应力水平

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摘要

Stress induced leakage current (SILC) has been investigated for different oxide types and thicknesses, as induced by different constant current stress levels. Stress dose and stress current density level effects on SILC have been separated and an universal SILC prediction model has been presented fitting all teh investigated oxide types.
机译:对于由不同的恒定电流应力水平引起的不同氧化物类型和厚度,已经研究了由应力引起的泄漏电流(SILC)。应力剂量和应力电流密度水平对SILC的影响已被分离,并提出了适合所有已研究氧化物类型的通用SILC预测模型。

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