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首页> 外文会议>Proceedings of the Fifth international symposium on test automation amp; instrumentation >Determination of trace impurities in high purity gases by gas chromatography with a pulsed discharge helium ionization detector
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Determination of trace impurities in high purity gases by gas chromatography with a pulsed discharge helium ionization detector

机译：脉冲放电氦电离检测器气相色谱法测定高纯气体中的痕量杂质

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摘要

A gas chromatographic system used for analyzing trace impurities of Ar,O2,N2,H2 and CO in high purity gases of He,Ar,O2 and H2 is described.The key part of the system consists of several columns and valves,the coupled detector is pulsed discharge helium ionization detector(PDHID).By using the system,good determination performance was obtained.For the selected impurity,the amount and specie could be determined through different ways by using different columns and valves.Moreover,several impurities could be analyzed during one run.The analytical reproducibility is also evaluated for the different amount of impurities.For impurities of several μmol/mol level,relative standard deviations(RSD)(n = 6)are usually lower than 1％,such as N2/He(6.79 μmol/mol,RSD = 0.63％),CO/He(4.24 μmol/mol,RSD = 0.34％)and N2/O2(3.52 μmol/mol,RSD = 0.31％).With the impurity concentration decreasing,RSDs increase and are usually approximate to 3％or lower than 3％,such as N2/Ar(0.35 μmol/mol,RSD = 2.33％),Ar/H2(0.015 μmol/mol,RSD = 2.74％)and N2/H2(0.04 μmol/mol,RSD = 2.05％).Above all,the RSDs are acceptable for these impurities with different amounts.
机译：介绍了一种用于分析高纯He，Ar，O2和H2气体中Ar，O2，N2，H2和CO中痕量杂质的气相色谱系统。该系统的关键部分由数个柱和阀组成，耦合检测器使用该系统可获得良好的测定性能。对于所选择的杂质，可以使用不同的色谱柱和阀通过不同的方式确定其含量和种类。此外，还可以分析几种杂质。在一次运行中，还评估了不同杂质含量的分析重现性。对于几种μmol/ mol水平的杂质，相对标准偏差（RSD）（n = 6）通常小于1％，例如N2 / He（ 6.79μmol/ mol，RSD = 0.63％），CO / He（4.24μmol/ mol，RSD = 0.34％）和N2 / O2（3.52μmol/ mol，RSD = 0.31％）。随着杂质浓度的降低，RSDs增加和通常约为3％或低于3％，例如N2 / Ar（0.35μmol/ mol，RSD = 2.33％），Ar / H2（0.015 μmol/ mol，RSD = 2.74％）和N2 / H2（0.04μmol/ mol，RSD = 2.05％）。首先，这些杂质的不同含量，RSD都可以接受。

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