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Detecting trace impurities, in gases used in semiconductor manufacture, involves mixing process gas with ionizable gas and ionizing impurities to enforce its discharge
Detecting trace impurities, in gases used in semiconductor manufacture, involves mixing process gas with ionizable gas and ionizing impurities to enforce its discharge
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机译：检测半导体制造气体中的痕量杂质涉及将工艺气体与可电离的气体混合并电离杂质以强制其排放
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摘要
ionizing a gas at atmospheric pressure to detect its impurities includes mixing the gas with an ionizable gas and introducing the mixture into a chamber having a discharge electrode. A voltage applied to the electrode ionizes the ionizable gas so it discharges and ionizes impurities in the gas to be analyzed. The ionizable gas is pre-purified. The mixture is introduced into the chamber so that the chamber is continuously purged.
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