• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Proceedings of the First International Conference on Application and Commercialization of Sol-Gel Processing, Saarbruecken, Germany >Optical disk substrate fabricated y the sol-gel method
【24h】

Optical disk substrate fabricated y the sol-gel method

机译：溶胶-凝胶法制备的光盘基板

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Pregrooves for optical memory disks have s uccessfully been fabricated in sol-gel deived SiO_2 films on glass substrates of 130 mm in diameter, using a newly developed fine-patterning process. The patterning is carried out under vacuum by pressing a stamper against the SiO_2 gel film containing poly(ethylene glycol), PEG, and then the gel film is pre-heat treated with being pressed by the stamper. After the gel film becomes hard, the stamper is removed and the glass disk substrate with patterned gel film is finally hat-treated at 350 deg C to decompose PEG and to be densified. The process time is shortened to the practial fabrication level by optimizing the pre-heat treatment temperature and the amount of PEG added on the basis of the hardening properties of the gel films. The pregroove depth and pitch of the glass disk substrates fabricated show almost constant values at a given radius. The mechanical characteristics of the glass disk substrates stisfy the international standard (SIO/IEC 10089). SThe noise levels of the fabricated glass disk substrates are also low enough for the practical use. It is noted that the sol-gel pregrooved glass disk substrates have excellent weathering resistance compared with even the coonventional glass disk substrates by the photo-polymerizable resin method or by the dry etching method.
机译：使用新开发的精细图案化工艺，已成功地在直径130 mm的玻璃基板上以溶胶凝胶衍生的SiO_2膜制成了用于光学存储盘的预刻槽。通过在包含聚（乙二醇），PEG的SiO 2凝胶膜上压制压模，在真空下进行构图，然后通过压模对凝胶膜进行预热处理。凝胶膜变硬后，除去压模，将具有图案化的凝胶膜的玻璃圆盘基板最终在350℃下进行帽子处理，以分解PEG并致密化。通过优化预热处理温度和基于凝胶膜的硬化性能而添加的PEG量，可将处理时间缩短至实用的制造水平。所制造的玻璃盘基板的预刻槽深度和间距在给定半径下显示几乎恒定的值。玻璃盘基板的机械特性满足国际标准（SIO / IEC 10089）。 ●制成的玻璃盘基板的噪声水平也足够低，无法实际使用。应当注意，与通过光聚合树脂法或通过干蚀刻法的常规玻璃盘基片相比，溶胶-凝胶预刻槽玻璃盘基片具有优异的耐候性。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号