MEASUREMENT AND COMPENSATION OF BAR-MIRROR FLATNESS AND SQUARENESS ERROR USING HIGH PRECISION STAGE

机译：高精度阶段对条形镜平整度和方差的测量和补偿

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In precision stage systems, laser interferometers are used to measure positions of the stage. Laser interferometers have to be used with bar-mirrors to reflect laser. As the length of bar-mirrors is lengthen, the flatness of bar-mirror become large. Setup and environment of experiment such as temperature variation are also the reason of errors. The deformation of bar-mirror's shape cause straightness error, and setup error cause squareness error of precision stages. So, to improve precision stage's performance, error measurement and compensation are necessariness.

机译：在精密平台系统中，激光干涉仪用于测量平台的位置。激光干涉仪必须与条形镜一起使用以反射激光。随着条形镜的长度变长，条形镜的平面度变大。实验设置和环境（例如温度变化）也是导致错误的原因。条形镜形状的变形会导致直线度误差，而设置误差会导致精密平台的垂直度误差。因此，为了提高精密平台的性能，必须进行误差测量和补偿。

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来源
《Proceedings of the Twenty-sixth annual meeting of the American Society for Precision Engineering》|2011年|p.566-569|共4页
会议地点 Denver CO(US);Denver CO(US)
作者
Siwoong Woo; Dahoon Ahn; Daegab Gweon; Sunho Lee; Junkyu Park;
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作者单位

Department of Mechanical Engineering Korea Advanced Institute of Science and Technology Daejeon, Republic of Korea;

Department of Mechanical Engineering Korea Advanced Institute of Science and Technology Daejeon, Republic of Korea;

Department of Mechanical Engineering Korea Advanced Institute of Science and Technology Daejeon, Republic of Korea;

Stage Business Team EVERTECHNO Co., Ltd Cheonan, Republic of Korea;

Stage Business Team EVERTECHNO Co., Ltd Cheonan, Republic of Korea;

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正文语种 eng
中图分类机械加工精度理论;
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MEASUREMENT AND COMPENSATION OF BAR-MIRROR FLATNESS AND SQUARENESS ERROR USING HIGH PRECISION STAGE

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