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首页> 外文会议>Proceedings of the Twenty-sixth annual meeting of the American Society for Precision Engineering >PRECISION MOTION CONTROL OF ULTRAHIGH-ACCELERATION AND HIGH-VELOCITY LINEAR DRIVE MECHANISM
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PRECISION MOTION CONTROL OF ULTRAHIGH-ACCELERATION AND HIGH-VELOCITY LINEAR DRIVE MECHANISM

机译：超高速和高速线性驱动机构的精密运动控制

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摘要

In this paper, the motion control results of the ultrahigh-acceleration and high-velocity linear drive mechanism were introduced. The linear drive mechanism has the ability to move at the acceleration higher than 79.4G and at the velocity higher than 11m/s. For the mechanism, the controller comprising the 2DOF compensator, the disturbance observer and the cogging force compensator was designed. The experimental result shows that the controller are effective to reduce the tracking errors and that the controller makes the tracking error smaller than 1 μm.
机译：介绍了超高速，高速直线驱动机构的运动控制结果。线性驱动机构能够以高于79.4G的加速度和高于11m / s的速度运动。对于该机构，设计了包括2DOF补偿器，扰动观测器和齿槽力补偿器的控制器。实验结果表明，该控制器有效地减小了跟踪误差，并且使跟踪误差小于1μm。

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