DESIGN, MANUFACTURE, AND TESTING OF NANOMETER-LEVEL SPINDLE METROLOGY TESTBALLS

机译：纳米级主轴计量测试球的设计，制造和测试

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Nanometer-level spindle metrology requires a suitable artifact, an accurate sensor, stiff fixturing, and a low-noise data acquisition and display system [1]. A commonly used artifact for this purpose is a lapped sphere, referred to here as a testball. This paper discusses spindle metrology and the aspects of testball design, ball lapping, metrology, and calibration using multiprobe error separation.

机译：纳米级的主轴计量需要合适的工件，精确的传感器，刚性夹具以及低噪声的数据采集和显示系统[1]。为此目的通常使用的伪像是研磨球，在此称为测试球。本文讨论了主轴计量以及测试球设计，球研磨，计量和使用多探针误差分离进行校准的各个方面。

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来源
《Proceedings of the Twenty-sixth annual meeting of the American Society for Precision Engineering》|2011年|p.495-498|共4页
会议地点 Denver CO(US);Denver CO(US)
作者
Byron R. Knapp; David A. Arneson; Melvin J. Liebers;
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Professional Instruments Company Hopkins, Minnesota, USA;

Professional Instruments Company Hopkins, Minnesota, USA;

Professional Instruments Company Hopkins, Minnesota, USA;

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原文格式 PDF
正文语种 eng
中图分类机械加工精度理论;
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4. DESIGN, MANUFACTURE, AND TESTING OF NANOMETER-LEVEL SPINDLE METROLOGY TESTBALLS [C] . Byron R. Knapp, David A. Arneson, Melvin J. Liebers, Annual Meeting of The American Society for Precision Engineering . 2011

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DESIGN, MANUFACTURE, AND TESTING OF NANOMETER-LEVEL SPINDLE METROLOGY TESTBALLS

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