MEASUREMENT OF NITROGEN CONCENTRATION IN CZ-Si BELOW 10~(14)/cm~3 BY IR ABSORPTION SPECTROSCOPY

机译：红外吸收光谱法测量CZ-Si中氮含量在10〜（14）/ cm〜3以下

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

Infrared absorption (IR) spectroscopy was examined to establish the measurement method of nitrogen concentration in CZ silicon below 10~(14) atoms/cm~3. Signal to noise ratio of spectrometer was improved and arithmetic procedure was established to eliminate interfering absorption peaks. Peaks at 810 and 1018 cm~(-1) showed dependence on estimated nitrogen concentration. Samples whose shallow thermal donor (STD) concentration was determined by far IR measurement were also measured. Absorption coefficient showed the similar concentration dependence to STD concentration and the obtained concentration was nearly equal to STD concentration.

机译：通过红外吸收光谱法建立了CZ硅中氮浓度低于10〜（14）atoms / cm〜3的测定方法。改进了光谱仪的信噪比，并建立了消除干扰吸收峰的算法程序。 810和1018 cm〜（-1）处的峰值表现出对估计氮浓度的依赖性。还测量了通过远红外测量确定浅热供体（STD）浓度的样品。吸收系数显示出与STD浓度相似的浓度依赖性，所获得的浓度几乎等于STD浓度。

著录项

来源
《Proceedings vol.2004-05; International Symposium on High Purity Silicon and Meeting of the Electrochemical Society; 20041003-08; Honolulu,HI(US)》|2004年|P.102-108|共7页
会议地点 HonoluluHI(US)
作者
M. Nakatsu; A. Hashimoto; A. Natsume; N. Inoue; H. Ono;
展开▼
作者单位

RIAST, Osaka Prefecture University, 1-2, Gakuen-cho, Sakai, Osaka 599-8570, Japan;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类 TN304.12;
关键词

相似文献

外文文献
中文文献
专利

1. Determination of low concentrations of N and C in CZ-Si by precise FT-IR spectroscopy [J] . V.D. Akhmetov, H. Richter, N. Inoue Materials Science and Engineering. B, Solid-State Materials for Advanced Technology . 2006,第2a3期

机译：精密FT-IR光谱法测定CZ-Si中低浓度的N和C
2. First Calibration of an IR Absorption Spectroscopy System for the Measurement of H_2, D_2, and HD Concentration in the Liquid Phase [J] . Robin Größle, Alexander Kraus, Sebastian Mirz, Fusion Science and Technology . 2017,第3期

机译：红外吸收光谱系统的首次校准，用于测量液相中的H_2，D_2和HD浓度
3. Studies of the horizontal inhomogeneities in NOsub2/sub concentrations above a shipping lane using ground-based multi-axis differential optical absorption spectroscopy (MAX-DOAS) measurements and validation with airborne imaging DOAS measurements [J] . André Seyler, Andreas C. Meier, Folkard Wittrock, Atmospheric Measurement Techniques . 2019,第11期

机译：使用基于地基的多轴差分光学吸收光谱（MAX-DOA）测量和验证，NO _{2 浓度上方的水平不均匀性的研究和空气传播成像DOAS测量}
4. MEASUREMENT OF NITROGEN CONCENTRATION IN CZ-Si BELOW 1014/cm3 BY IR ABSORPTION SPECTROSCOPY [C] . M. Nakatsu, A. Hashimoto, A. Natsume, International Symposium on High Purity Silicon . 2004

机译：通过IR吸收光谱测量CZ-Si低于1014 / cm 3的氮浓度
5. Differential optical absorption spectroscopy (DOAS) measurements of atmospheric ammonia in the mid-ultraviolet from a dairy: Concentrations, emissions, and modeling. [D] . Rumburg, Brian Paul. 2006

机译：乳制品中紫外线中的大气氨的差分光吸收光谱法（DOAS）测量：浓度，排放量和模型。
6. Interaction of Copper Phthalocyanine with NitrogenDioxide and Ammonia Investigation Using X-ray Absorption Spectroscopyand Chemiresistive Gas Measurements [O] . LipingSharon Chia, Yong Hua Du, Suresh Palale, 2019

机译：酞菁铜与氮的相互作用X射线吸收光谱法研究二氧化氮和氨和化学气体测量
7. Measurements of the NO2 absorption cross-section from 42 000 cm-1 to 10 000 cm-1 (238-1000 nm) at 220 K and 294 K [O] . Vandaele, Ann Carine, Hermans, Christian, Simon, Paul C, 1998

机译：在220 K和294 K下测量42 000 cm-1至10000 cm-1（238-1000 nm）的NO2吸收截面

MEASUREMENT OF NITROGEN CONCENTRATION IN CZ-Si BELOW 10~(14)/cm~3 BY IR ABSORPTION SPECTROSCOPY

摘要

著录项

相似文献

相关主题

期刊订阅