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首页> 外文会议>Proceedings vol.2005-08; International Symposium on Microelectronics Technology and Devices(SBMICRO 2005); 200509; >THERMALLY ACTUATED MEMS ALL BASED ON PECVD MATERIALS OBTAINED AT LOW TEMPERATURE
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THERMALLY ACTUATED MEMS ALL BASED ON PECVD MATERIALS OBTAINED AT LOW TEMPERATURE

机译：所有基于低温获得的PECVD材料的热致动MEMS

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摘要

The fabrication of a fully operational thermally actuated MEMS all based on PECVD materials is reported. This micro-electro-mechanical system consist of matrixes of free standing a-SiC:H/SiO_xN_y cantilevers actuated by thermal expansion induced by Joule effect. The structure motion is obtained applying an electrical voltage to heating elements integrated in the cantilevers and it is a consequence of differences in the thermal expansion of both materials (a-SiC:H and SiO_xN_y). The mobile cantilevers are fabricated by front side bulk micromachining of c-Si substrates. Chromium metal is used as contact metal and heating element. The structures were characterized studying the obtained motion for different applied voltages. The results show that up/down motion with amplitudes of ～20 ?m are obtained for heating currents of 20 mA. If the voltage is applied in on/off cycles, the up/down motion is observed up to frequencies of 150 Hz, but for increasing frequency, a reduction of the movement amplitude is observed. Further, when the cantilevers are actuated in a synchronized way, ciliary motion is obtained.
机译：报告了完全基于PECVD材料的完全可操作的热驱动MEMS的制造。该微机电系统由焦耳效应引起的热膨胀致动的独立a-SiC：H / SiO_xN_y悬臂矩阵组成。将电压施加到集成在悬臂中的加热元件上即可获得结构运动，这是两种材料（a-SiC：H和SiO_xN_y）热膨胀差异的结果。可移动悬臂是通过c-Si基板的正面本体微加工制造的。铬金属用作接触金属和加热元件。通过研究在不同施加电压下获得的运动来表征结构。结果表明，在20 mA的加热电流下，可获得约20？m幅度的上下运动。如果在开/关周期中施加电压，则观察到频率高达150 Hz的向上/向下运动，但是对于增加的频率，观察到运动幅度减小。此外，当悬臂以同步方式致动时，获得睫状运动。

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