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首页> 外文会议>Proceedings vol.2005-08; International Symposium on Microelectronics Technology and Devices(SBMICRO 2005); 200509; >A CMOS TECHNOLOGY FOR EDUCATIONAL ACTIVITIES AND ACADEMIC PROJECTS
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A CMOS TECHNOLOGY FOR EDUCATIONAL ACTIVITIES AND ACADEMIC PROJECTS

机译：一种用于教育活动和学术项目的CMOS技术

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摘要

A CMOS technology for educational activities and academic projects has been performed. The CMOS device fabrication process and electrical parameter simulations were obtained by ATHENA (from SILVACO) and PISCES software, respectively. So, CMOS devices, such as capacitors, transistors and inverters, were fabricated and their electrical parameters extracted using a HP4145B and Keitlhey 4200 SCS parameter analyzer. These experimental results were used to obtain the SPICE MOSFET level-3 static model. The SILVACO and SPICE simulations were employed to obtain CMOS device design kit. The experimental and simulated results of CMOS transistor and inverter were compared to validate the design kit. Based on this kit, a chip with digital and analogic projects has been fabricated.
机译：已经进行了用于教育活动和学术项目的CMOS技术。分别通过ATHENA（来自SILVACO）和PISCES软件获得CMOS器件的制造工艺和电参数仿真。因此，制造了CMOS器件，例如电容器，晶体管和逆变器，并使用HP4145B和Keitlhey 4200 SCS参数分析仪提取了其电参数。这些实验结果用于获得SPICE MOSFET 3级静态模型。利用SILVACO和SPICE仿真来获得CMOS器件设计套件。比较了CMOS晶体管和逆变器的实验和仿真结果，以验证设计套件的有效性。基于该套件，已制造出具有数字和模拟项目的芯片。

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