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The suspended SU-8 waveguide MSM-photodetector for visible light directly based on silicon substrate

机译：悬挂式SU-8波导MSM光电探测器，直接基于硅衬底用于可见光

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摘要

The suspended waveguide MSM (metal-semiconductor-metal)-photodetector for visible light is designed and fabricated directly based on silicon substrate due to the fact that the SU-8 ridge waveguide has a low absorption loss and the silicon can work as active material during visible light range. An intermediate layer between waveguide and silicon has been adopted to protect the electrode during wet etching. Through the selection of more appropriate intermediate layer material and the improved fabrication process, the length of electrode decreases from 710 μm to 150 μm and the dark current is reduced from 4.39 uA@5V to 200 nA@2.5 V, meanwhile the responsibility is improved from 0.232A/W@5V to 0.326 A/W@2.5 V.
机译：由于SU-8脊形波导的吸收损耗低，并且硅可以用作活性材料，因此悬挂式波导MSM（金属-金属-金属）光电探测器直接基于硅基板进行设计和制造。可见光范围。波导和硅之间的中间层已经被采用以在湿法蚀刻期间保护电极。通过选择更合适的中间层材料和改进的制造工艺，电极的长度从710μm减小到150μm，暗电流从4.39 uA @ 5V减小到200 nA@2.5 V，同时责任也从0.232A/W@5V至0.326 A/W@2.5 V.

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