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Influence of elevator moving pattern and velocity on the airflow uniformity for an LCD panel delivery facility

机译:升降机的移动方式和速度对LCD面板交付设备气流均匀性的影响

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摘要

Owing to the increasing LCD panel size, the difficulty on delivering the glass substrate has been enhanced dramatically and become a critical problem in the LCD manufacturing industry. Nowadays, most of panel fabrication factory utilize the fully-automated delivering technology instead of the traditional labor delivery for diminishing the possibility of polluted particles on the LCD board. Thus, this study intends to investigate on maintaining the air quality inside the delivering facility with a moving elevator. Also, special emphasis is focused on the influence on the moving pattern and velocity of the elevator via numerical technique. Firstly, CFD code Fluent is used to execute the transient flow simulation and evaluate the flow patterns inside this delivery equipment. From analyzing the calculated results, it is found that the inferior air is generated mainly by the increasing vortex inside the delivery equipment for an upward-moving elevator. On the contrary, the flow field becomes very smooth without obvious vortex phenomenon, and thus induces a better air quality when the elevator moves downward. However, a better uniform flow field occurred when the elevator is moving upward. In addition, the airflow uniformity is not effectively improved by reducing the elevator velocity and increasing the FFU airflow velocity. It is concluded that the moving pattern of elevator has an essential impact and can be utilized to improve the air quality inside the LCD delivery facility.
机译:由于LCD面板尺寸的增加,传送玻璃基板的困难已大大增加,并成为LCD制造工业中的关键问题。如今,大多数面板制造厂都采用全自动的传送技术,而不是传统的人工传送,以减少LCD板上被污染的颗粒的可能性。因此,本研究旨在研究如何利用移动的电梯来维持运送设施内部的空气质量。另外,通过数值技术特别强调对电梯的运动模式和速度的影响。首先,使用CFD代码Fluent执行瞬态流模拟并评估该输送设备内部的流型。通过对计算结果的分析,发现劣质空气主要是由用于向上移动的电梯的输送设备内部的涡流增加所产生的。相反,流场变得非常平滑,没有明显的涡旋现象,因此当电梯向下移动时,会引起更好的空气质量。但是,当电梯向上移动时,会出现更好的均匀流场。另外,通过降低电梯速度并增加FFU气流速度不能有效地改善气流均匀性。得出的结论是,电梯的运行方式具有至关重要的影响,可以用来改善LCD交付设施内部的空气质量。

著录项

  • 来源
    《Recent researches in mechanics》|2011年|p.81-87|共7页
  • 会议地点 Corfu Island(GR);Corfu Island(GR);Corfu Island(GR);Corfu Island(GR);Corfu Island(GR);Corfu Island(GR);Corfu Island(GR);Corfu Island(GR)
  • 作者单位

    Department of Mechanical Engineering National Taiwan University of Science and Technology Taipei, Taiwan;

    Department of Mechanical Engineering Chung Hua University Taipei, Taiwan;

    Department of Mechanical Engineering National Taiwan University of Science and Technology Taipei, Taiwan;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 机械制造工艺;
  • 关键词

    delivery facility; LCD; transient simulation; vortex;

    机译:送货设施; LCD;瞬态仿真涡流;

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