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首页> 外文会议>Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI; Proceedings of SPIE-The International Society for Optical Engineering; vol.6463 >Hybrid approach to MEMS reliability assessment
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Hybrid approach to MEMS reliability assessment

机译：MEMS可靠性评估的混合方法

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摘要

Recent advances in MEMS technology have led to development of a multitude of new devices. However applications of these devices are hampered by challenges posed by limited understanding of their reliability particularly the impacts of long-term storage. Current trend in microanosystems is to produce ever smaller, lighter, and more capable devices in greater quantities and at a lower cost than ever before. In addition, the finished products have to operate at very low power and in very adverse conditions while assuring durable and reliable performance. Some of the new devices are being developed to function at high operational speeds, others to make accurate measurements of operating conditions in specific processes. Regardless of their application, the devices have to be reliable while in use. MEMS reliability, however, is application specific and, usually, has to be developed on a case by case basis. This paper presents a hybrid approach/methodology particularly suitable to quantitative studies of various aspects in MEMS reliability assessment. The presentation is illustrated with selected examples representing an initial study of reliability of specific MEMS. By quantitatively characterizing performance of MEMS, under different operating conditions, we can make specific suggestions for their improvements. Then, using the hybrid approach/methodology, we can verify the effect of these improvements. In this way, we can develop better understanding of functional characteristics of MEMS sensors, which will ensure that these sensors are operated at maximum performance, are durable, and are reliable.
机译：MEMS技术的最新进展导致了许多新设备的开发。但是，由于对它们的可靠性（尤其是长期存储的影响）的了解有限，所带来的挑战阻碍了这些设备的应用。微/纳米系统的当前趋势是，要比以往任何时候都更大量，更低成本地生产出更小，更轻，功能更强大的设备。另外，成品必须在非常低的功率和非常不利的条件下工作，同时还要确保耐用和可靠的性能。正在开发一些新设备，使其能够以较高的运行速度运行，而另一些新设备则可以对特定过程中的运行条件进行准确的测量。无论其应用如何，设备在使用时都必须可靠。但是，MEMS的可靠性是特定于应用的，通常必须视具体情况而定。本文提出了一种混合方法/方法，特别适用于MEMS可靠性评估各个方面的定量研究。演示用选定的示例进行了说明，这些示例代表了特定MEMS可靠性的初步研究。通过定量表征MEMS在不同工作条件下的性能，我们可以针对其改进提出具体建议。然后，使用混合方法/方法，我们可以验证这些改进的效果。通过这种方式，我们可以更好地理解MEMS传感器的功能特性，从而确保这些传感器以最佳性能运行，耐用且可靠。

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