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首页> 外文会议>Reliability, packaging, testing, and characterization of MEMS/MOEMS and nanodevices IX >A 2-DOF MEMS Positioning System
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A 2-DOF MEMS Positioning System

机译：2自由度MEMS定位系统

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We report on the design, fabrication, and testing of a 2 degree of freedom MEMS positioning system. Sandia National Laboratories' MEMS foundry process was utilized for the fabrication of the device; this process incorporates five layers of polysilicon and four sacrificial layers of silicon dioxide. The actuation was achieved by identical comb-drives on both axes. The comb drives produce a displacement of ～ 4 μm which was amplified to ～ 30 μrn by the use of a distance multiplier. A pin and track arrangement in the X and Y arms, extending from the actuator assembly, allows bi-axis motion. The stage is connected to the central pin. For testing the performance of the fabricated design a custom made optical characterization setup was assembled. To provide the actuation signals to the stage, a Keithley 2400 source meter was programmed using Lab View to provide actuation voltages from 0-100 V with a 2 volt step. An optical microscope, interfaced with a Canon S5 IS digital camera, was used to record the actuation events for the measurement of in-plane displacement. Displacement at the various actuation voltages was obtained using a National Instruments' Vision image analysis software routine. The device has been tested and demonstrates a useful design for realizing a bi-directional 2-D positioning system. The positioning system is capable of 0 - 30 μm of motion in both the X and Y axes, with displacement showing a quadratic relationship with the applied voltage.
机译：我们报告2自由度MEMS定位系统的设计，制造和测试。桑迪亚国家实验室的MEMS铸造工艺被用于制造该器件。该工艺结合了五层多晶硅和四层二氧化硅牺牲层。通过两个轴上相同的梳齿驱动器来实现驱动。梳齿驱动器产生的位移为〜4μm，通过使用距离倍增器将其放大至〜30μrn。从执行器组件延伸的X臂和Y臂中的销和滑轨装置允许双轴运动。平台连接到中央引脚。为了测试制造设计的性能，组装了定制的光学表征装置。为了向舞台提供激励信号，使用Lab View对Keithley 2400源仪表进行了编程，以2伏的步进提供0-100 V的激励电压。光学显微镜与佳能S5 IS数码相机接口，用于记录驱动事件以测量平面位移。使用National Instruments的Vision图像分析软件例程可得到在各种驱动电压下的位移。该设备已经过测试，并演示了用于实现双向2-D定位系统的有用设计。定位系统能够在X轴和Y轴上运动0-30μm，位移与施加的电压呈二次关系。

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