High precision silicon platform using self-aligment process

机译：采用自对准工艺的高精度硅平台

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Silicon platforms were fabricated for optical modules and realize sub-micron precision using self-alignment process. This paper features a self-alignment process and use of precision platforms.

机译：硅平台被制造用于光学模块，并通过自对准过程实现亚微米精度。本文介绍了自对准过程和精密平台的使用。

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《Reliability of photonics materials and structures》|1998年|p.375-383|共9页
会议地点 San Francisco CA(US)
作者
S.Sakushima; K. Nakashima; Y. Masuda; S. Abe; K. Takemura; M. Kyomasu;
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正文语种 eng
中图分类一般工业技术;
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4. High precision silicon platform using self-aligment process [C] . S.Sakushima, K. Nakashima, Y. Masuda, Symposium on reliability of photonics materials and structures . 1998

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High precision silicon platform using self-aligment process

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