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A comparative study of charge trapping effects in LDDsurface-channel and buried-channel pMOS transistors using chargeprofiling and threshold voltage shift measurements

机译:使用电荷 n轮廓分析和阈值电压偏移测量比较LDD n表面沟道和掩埋沟道pMOS晶体管中的电荷陷阱效应

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摘要

Extracted charge profiles of lightly-doped drain (LDD)nsurface-channel and buried-channel pMOS devices stressed undernhot-carrier injection conditions reveal predominant electron trappingnnear the gate edge at the drain region in both cases. From thresholdnvoltage measurements, there is some evidence of hole trapping after longnstress times in surface-channel pMOSFETs, but not in buried-channelndevices
机译:在热载流子注入条件下受到应力的轻掺杂漏极(LDD)n沟道和掩埋沟道pMOS器件的提取电荷分布表明,在两种情况下,主要的电子陷阱都靠近漏极区域的栅极边缘。根据阈值电压测量,有一些证据表明,在表面沟道pMOSFET中,应力持续时间过长会导致空穴陷阱,但在埋入沟道n器件中则不会

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