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Design and fabrication of 2D photonic crystals by holographic lithography

机译:全息光刻设计和制造二维光子晶体

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Two dimensional photonic crystals slabs can be recorded using a double exposure of a photoresist film to an interference fringe pattern. In order to present an expressive PBG (photonic band gap) for a desired region of the electromagnetic spectrum, the geometry of the 2 dimensional structures must be appropriately defined. Besides the geometric requirements, the material itself, in which the structures are recorded, must be transparent and present high refractive index in electromagnetic region of the PBG. In this paper we design and fabricate two dimensional PC (Photonic Crystals) in dielectric films on glass substrates. The use of optical materials instead of semiconductors allows the development of processes able to produce P. C. for the visible part of the spectrum.
机译:可以使用光致抗蚀剂膜对干涉条纹图案的两次曝光来记录二维光子晶体平板。为了呈现针对电磁频谱的期望区域的表达性PBG(光子带隙),必须适当定义二维结构的几何形状。除了几何要求之外,记录结构的材料本身必须是透明的,并且在PBG的电磁区域中具有高折射率。在本文中,我们在玻璃基板上的介电膜中设计和制造二维PC(光子晶体)。使用光学材料而不是半导体允许开发能够为光谱的可见部分产生P.C.的方法。

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