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Chromatic confocal method for determination of the refractive index and thickness

机译:色共聚焦法测定折射率和厚度

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摘要

The chromatic confocal method to measure the refractive index and thickness of membranes is developed. The method is based on the longitudinal chromatic aberration produced by a diffractive element. The identification of the maximal spectral components coming from the membranes are used for measuring its thickness or its refractive index.
机译:建立了用于测量膜的折射率和厚度的彩色共聚焦方法。该方法基于由衍射元件产生的纵向色差。鉴定来自膜的最大光谱成分用于测量其厚度或折射率。

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