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THE MICROMECHANICAL PRECISION ACCELEROMETER IN CONDITIONS OF THERMAL EFFECTS

机译:热效应条件下的微机械精密加速度计

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摘要

The mathematical models of thermal processes are constructed and the research of a non-steady, three-dimensional temperature field of the accelerometer keeping a micromechanical sensor, electronic plate with distributed heat sources release of given power is conducted. Are constructed and the mathematical models of flat and flexural tight - strained slate of a sensor of the accelerometer with allowance for of temperature effects and dynamic effects are investigated. Is constructed the mathematical model of drift conditioned by temperature disturbances in a counting channel of the accelerometer and is investigated. Are obtained qualitative and quantitative assessments of parameters of a thermal drift of the accelerometer. The guidelines on minimization of its thermal drift are developed.
机译:构造了热过程的数学模型,并研究了保持微机械传感器的加速度计的非稳态三维温度场,对具有分布热源的电子板释放给定功率进行了研究。构造了加速度计传感器的平面和挠曲紧应变板的数学模型,并考虑了温度影响和动态影响。建立了加速度计计数通道中温度扰动条件下的漂移数学模型,并进行了研究。获得了加速度计热漂移参数的定性和定量评估。制定了最小化其热漂移的指南。

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