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USING ILS WITH DP TO SOLVE SINGLE-FURNACE BATCH SCHEDULING PROBLEMS

机译：将ILS与DP结合使用以解决单炉批量调度问题

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摘要

Recently, the semiconductor manufacturing plays an important role in the semiconductor industry and the re-entry characteristic of the semiconductor manufacturing makes the production management more complicated, especially for furnace processes. Since the furnace process is the first stage of the re-entry process, the better furnace scheduling will lead the succeeding processes smoothly. Additionally, the furnace process belongs to a batch process that handles multiple lots concurrently, so how to schedule these batches more efficiently becomes a critical issue. Therefore, the purpose of this research is to propose a framework to solve the furnace batch scheduling. The objective of the proposed framework is to minimize the total weight tardiness (TWT) for the furnace batch scheduling. In the real environment, the setup time would be changed by different recipes. Furthermore, there is a special situation that the batch size of furnaces depends on the recipe of each product. Here, the unit of batch size is defined by a piece. Hence, this study considers these factors into the simulation model. This research proposes an iterated local search (ILS) joined with dynamic programming (DP) to solve the batch scheduling problem. Here, the ILS is to decide the job sequence and the DP is to assign sequential jobs into batches by minimizing the TWT. The results show that the proposed algorithm provides a better scheduling for the furnace to enhance the production performance, and this algorithm can be easily implemented for practice.
机译：近来，半导体制造在半导体工业中起着重要的作用，并且半导体制造的再进入特性使生产管理变得更加复杂，尤其是对于熔炉工艺而言。由于熔炉过程是再入过程的第一阶段，因此更好的熔炉调度将顺利地引导后续过程。此外，熔炉过程属于一个批处理过程，该过程可以同时处理多个批次，因此如何更有效地安排这些批次成为一个关键问题。因此，本研究的目的是提出一个解决炉批调度的框架。所提出的框架的目的是最小化炉批调度中的总重量迟滞（TWT）。在实际环境中，准备时间将通过不同的配方进行更改。此外，还有一种特殊情况，即炉子的批量大小取决于每种产品的配方。在此，批量大小的单位由一块定义。因此，本研究将这些因素纳入仿真模型。这项研究提出了结合动态规划（DP）的迭代局部搜索（ILS）解决批处理调度问题。在这里，ILS将决定作业顺序，而DP将通过最小化TWT来将顺序作业分配为批次。结果表明，该算法为炉的调度提供了更好的方法，提高了生产性能，易于实践。

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