Non-destructive Detection System for Micro-particle Contaminant on Super-smooth Optical Surface

著录项

• 来源
  《Science and technology to promote harmonized production》|2009年|1-5|共5页
• 会议地点 Shanghai(CN);Shanghai(CN)
• 作者

  Zheng Ren; Zhijiang Xie; Yi Wang; Xue Wang; Yong Jiang; Changchun Liu;

  展开▼
• 作者单位

  College of Mechanical Engineering, Chongqing University, Shapingba District, Chongqing400044, China;

  College of Mechanical Engineering,Chongqing University, Shapingba District, Chongqing400044, China;

  College of Mechanical Engineering,Chongqing University, Shapingba District, Chongqing400044, China;

  College of Mechanical Engineering,Chongqing University, Shapingba District, Chongqing400044, China;

  College of Mechanical Engineering,Chongqing University, Shapingba District, Chongqing400044, China;

  College of Mechanical Engineering,Chongqing University, Shapingba District, Chongqing400044, China;

  展开▼
• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 企业生产管理;
• 关键词

  Cleanliness level; non-destructive detection; Canny’s operator; RVM; micro-particle contamination;

  机译：清洁度；无损检测； Canny的运算符； RVM;微粒污染;