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CMOS Detectors for Space Applications: From RD to operational program with large volume foundry

机译：用于太空应用的CMOS检测器：从研发到大规模铸造的运营程序

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Nowadays, CMOS image sensors are widely considered for space applications. The use of CIS (CMOS Image sensor) processes has significantly enhanced their performances such as dark current, quantum efficiency and conversion gain. However, in order to fulfil specific space mission requirements, dedicated research and development work has to be performed to address specific detector performance issues. This is especially the case for dynamic range improvement through output voltage swing optimisation, control of conversion gain and noise reduction. These issues have been addressed in a 0.35μm CIS process, based on a large volume CMOS foundry, by several joint ISAE- EADS Astrium R&D programs. These results have been applied to the development of the visible and near-infrared multi-linear imager for the SENTINEL 2 mission (LEO Earth observation mission for the Global Measurement Environment and Security program). For this high performance multi-linear device, output voltage swing improvement is achieved by process optimisation done in collaboration with foundry. Conversion gain control is also achieved for each spectral band by managing photodiode capacitance. A low noise level at sensor output is reached by the use of an architecture allowing Correlated Double Sampling readout in order to eliminate reset noise (KTC noise). KTC noise elimination reveals noisy pixels due to RTS noise. Optimisation of transistors's dimensions, taking into account conversion gain constraints, is done to minimise these noisy pixels. Additional features have been also designed: 1) Due to different integration times between spectral bands required by mission, a specific readout mode was developed in order to avoid electrical perturbations during the integration time and readout. This readout mode leads to specific power supply architecture. 2)Post processing steps can be achieved by alignment marks design allowing a very good accuracy. These alignment marks can be used for a black coating deposition between spectral bands (pixel line) in order to minimise straight light effects. In conclusion a review of design improvements and performances of the final component is performed.
机译：如今，CMOS图像传感器已广泛用于太空应用。 CIS（CMOS图像传感器）工艺的使用大大提高了它们的性能，例如暗电流，量子效率和转换增益。但是，为了满足特定的太空任务要求，必须进行专门的研发工作以解决特定的探测器性能问题。通过输出电压摆幅优化，控制转换增益和降低噪声来改善动态范围的情况尤其如此。这些问题已由多个ISAE-EADS Astrium R＆D联合计划在0.35μmCIS工艺（基于大量CMOS晶圆厂）中解决。这些结果已用于SENTINEL 2任务（全球测量环境和安全计划的LEO地球观察任务）的可见光和近红外多线性成像仪的开发。对于这种高性能的多线性器件，通过与铸造厂合作完成工艺优化，可以实现输出电压摆幅的改善。通过管理光电二极管电容，还可以为每个光谱带实现转换增益控制。通过使用允许相关双采样读数的架构，可以消除传感器输出处的低噪声水平，从而消除复位噪声（KTC噪声）。由于RTS噪声，KTC噪声消除显示出嘈杂的像素。考虑到转换增益限制，对晶体管尺寸进行了优化，以最大程度地减少这些噪声像素。还设计了其他功能：1）由于任务所需的频谱带之间的积分时间不同，因此开发了一种特定的读数模式，以避免积分时间和读数期间的电干扰。这种读出模式导致特定的电源架构。 2）通过对准标记设计可以实现后期处理步骤，从而具有非常好的准确性。这些对准标记可用于在光谱带（像素线）之间进行黑色涂层沉积，以最大程度地减少直射光的影响。总之，对最终组件的设计改进和性能进行了审查。

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