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首页> 外文会议>Sensors, systems, and next-generation satellites XX >Low-loss interference filter arrays made by plasma-assisted reactive magnetron sputtering (PARMS) for high performance multispectral imaging
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Low-loss interference filter arrays made by plasma-assisted reactive magnetron sputtering (PARMS) for high performance multispectral imaging

机译：由等离子体辅助反应磁控溅射（PARMS）制成的低损耗干涉滤光片阵列，用于高性能多光谱成像

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Optical remote sensing of the earth from air and space typically utilizes several channels in the visible and near infrared spectrum. Thin-film optical interference filters, mostly of narrow bandpass type, are applied to select these channels. The filters are arranged in filter wheels, arrays of discrete stripe filters mounted in frames, or patterned arrays on a monolithic substrate. Such multi-channel filter assemblies can be mounted close to the detector, which allows a compact and lightweight camera design. Recent progress in image resolution and sensor sensitivity requires improvements of the optical filter performance. Higher demands placed on blocking in the UV and NIR and in between the spectral channels, in-band transmission and filter edge steepness as well as scattering lead to more complex filter coatings with thicknesses in the range of 10 -25μm. Technological limits of the conventionally used ion-assisted evaporation process (IAD) can be overcome only by more precise and higher-energetic coating technologies like plasma-assisted reactive magnetron sputtering (PARMS) in combination with optical broadband monitoring. Optics Balzers has developed a photolithographic patterning process for coating thicknesses up to 15um that is fully compatible with the advanced PARMS coating technology. This provides the possibility of depositing multiple complex high-performance filters on a monolithic substrate. We present an overview of the performance of recently developed filters with improved spectral performance designed for both monolithic filter-arrays and stripe filters mounted in frames. The pros and cons as well as the resulting limits of the filter designs for both configurations are discussed.
机译：从空中和太空对地球进行光学遥感通常会利用可见光谱和近红外光谱中的多个通道。薄膜光学干涉滤光片（主要是窄带通型）用于选择这些通道。滤光器排列在滤光器轮中，离散的条形滤光器阵列安装在框架中，或在整体式基板上形成图案。这样的多通道过滤器组件可以安装在检测器附近，从而可以实现紧凑轻便的摄像机设计。图像分辨率和传感器灵敏度的最新进展要求光学滤波器性能的提高。对紫外和近红外以及光谱通道之间的阻挡，带内透射和滤光片边缘陡度以及散射的更高要求导致了厚度在10-25μm范围内的滤光片涂层更加复杂。只能通过更精确，更高能量的涂层技术（例如等离子辅助反应磁控溅射（PARMS））与光学宽带监控相结合，才能克服常规使用的离子辅助蒸发工艺（IAD）的技术局限性。光学Balzers开发了一种光刻图案化工艺，用于最大厚度为15um的涂层，该工艺与先进的PARMS涂层技术完全兼容。这提供了在单块基板上沉积多个复杂的高性能滤波器的可能性。我们概述了最近开发的滤光片的性能，并为单片滤光片阵列和安装在框架中的条形滤光片设计了改进的光谱性能。讨论了两种配置的滤波器设计的优缺点以及由此产生的限制。

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