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首页> 外文会议>Seventh Internatioal Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life Pt.1, Sep 9-13, 2002, Novosibirsk, Russia >On-Line Ablation Measurement for Laser Material Processing and its Applications
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On-Line Ablation Measurement for Laser Material Processing and its Applications

机译：激光材料加工的在线烧蚀测量及其应用

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摘要

In Laser Material Processing, surfaces have to be measured at low apertures within the rough environment generated by the production process. As it is hardly possible to measure the material wear through the plasma at the working zone (at temperatures above 3000 K), common sensors would have a quite poor performance. The ablation sensor presented in this paper solves that problem by utilising just the plasma spot emitting a signal from which we evaluate the distance between sensor and work piece. The specific features of this sensor are: the measurement is not distorted by coherent noise and is insensitive against the (strongly varying) spot size and shape. Hence, the sensor displays extreme accuracy, even with low aperture and in presence of strong turbulence. The achievable measurement on-line uncertainty within the ablation process is σ = 3 μm using a CO_2-Laser. - A demand for even finer structures in laser ablation leads to a change from the Lasercaving process (using a CO_2-laser) to an ablation by sublimation (using a Nd:YAG laser). The intention is to decrease the thickness of each ablated layer, and thus, generating finer structures. In order to keep the ablation rates at an economically interesting value, the speed between laser and work piece surface has to be increased. This new ablation process tightens the requirements for the sensor performance, even more. In the paper we will explain the basic ideas of the sensor as well as the technology of implementation and a couple of successful applications.
机译：在激光材料加工中，必须在生产过程所产生的粗糙环境中的低孔径处测量表面。由于几乎不可能在工作区域（温度高于3000 K）下测量通过等离子体的材料磨损，因此普通传感器的性能将非常差。本文介绍的消融传感器通过仅利用发出信号的等离子点来解决该问题，据此我们可以评估传感器与工件之间的距离。该传感器的特殊功能是：测量不会因相干噪声而失真，并且对（剧烈变化的）光点大小和形状不敏感。因此，即使在小孔径和强湍流情况下，传感器也显示出极高的精度。使用CO_2激光在消融过程中可实现的在线测量不确定度为σ= 3μm。 -对激光烧蚀的更精细结构的需求导致了从激光切割工艺（使用CO_2激光）到升华烧蚀（使用Nd：YAG激光）的转变。目的是减小每个烧蚀层的厚度，从而产生更精细的结构。为了将烧蚀率保持在经济上有意义的值，必须提高激光与工件表面之间的速度。这种新的消融工艺进一步提高了对传感器性能的要求。在本文中，我们将解释传感器的基本概念，实现技术以及一些成功的应用。

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