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首页> 外文会议>Seventh International Symposium on Mechatronics and its Applications (ISMA' 10) >Theoretical characterization of square piezoelectric micro ultrasonic transducer for underwater applications
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Theoretical characterization of square piezoelectric micro ultrasonic transducer for underwater applications

机译：水下应用方形压电微超声换能器的理论表征

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摘要

There are numerous advantages of employing MEMS based transducer within underwater applications. This work utilized MEMS based acoustic transducer for underwater applications. Two common types of micro ultrasonic transducer are capacitive (cMUT) and piezoelectric (pMUT). In this study, square pMUT will be characterized using finite element method (FEM). The model consist of ZnO film as a piezo active layer and nickel aluminum bronze (CuAl10Ni5Fe4) as the electrodes, adhered on the silicon on insulator (SOI) wafer. Structural parameters namely diaphragm width and thickness were manipulated for resonance frequency tuning. Then, the model undergone piezoelectric and modal analyses to obtain the relationship between applied voltage and generated pressure and vise versa. Next, device sensitivity was estimated. After characterization, model design has been finalized to carry fundamental frequency of 50 kHz. It was also estimated that device transmitting voltage response is 139 dB re 1 µPa/V on the surface of the transducer while its receiving response was estimated at −69 dB re 1 V/µPa. Developed model should be fabricated in order to validate the findings and this will be included in our future works.
机译：在水下应用中采用基于MEMS的传感器有许多优点。这项工作将基于MEMS的声换能器用于水下应用。微型超声换能器的两种常见类型是电容（cMUT）和压电（pMUT）。在这项研究中，将使用有限元方法（FEM）对方形pMUT进行表征。该模型由作为压电活性层的ZnO膜和作为电极的镍铝青铜（CuAl 10 Ni 5 Fe 4 ）组成绝缘体上硅（SOI）晶圆。调节膜片的宽度和厚度等结构参数以进行共振频率调谐。然后，对该模型进行压电和模态分析，以获得施加电压与生成压力之间的关系，反之亦然。接下来，估计设备灵敏度。表征后，模型设计已最终确定为可承载50 kHz的基本频率。还据估计，传感器在传感器表面的发射电压响应为139 dB re 1 µPa / V，而其接收响应估计为-69 dB re 1 V / µPa。为了验证研究结果，应建立已开发的模型，并将其包含在我们的未来工作中。

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