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首页> 外文会议>Silicon compatible materials, processes, and technologies for advanced integrated circuits and emerging applications >3D MOSCAP Vehicle for Electrical Characterization of Sidewall Dielectrics for 3D Monolithic Integration
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3D MOSCAP Vehicle for Electrical Characterization of Sidewall Dielectrics for 3D Monolithic Integration

机译：用于3D单片集成的侧壁介电层电气特性的3D MOSCAP车辆

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摘要

We have developed a 3D MOSCAP to characterize sidewall dielectric electrical performance to help gauge the quality and reliability of non-planar devices, such as FinFETs. The 3D MOSCAP can be used for process and materials development for high-K metal gate, spacer, and liner applications for 3D monolithic integration for future generation devices. In comparison, a traditional 2D (planar) MOSCAP is for characterization of dielectrics in the horizontal plane only. This study used different oxides as examples to compare the sidewall dielectric quality and electrical performance, and compare with that of oxide on a horizontal surface. A data analysis methodology is developed and demonstrated to extract sidewall dielectric properties from measured electrical results.
机译：我们已经开发出3D MOSCAP来表征侧壁介电电性能，以帮助评估非平面器件（例如FinFET）的质量和可靠性。 3D MOSCAP可用于高K金属栅极，间隔物和衬里应用的工艺和材料开发，以用于下一代器件的3D单片集成。相比之下，传统的2D（平面）MOSCAP仅用于表征水平面中的电介质。本研究以不同氧化物为例，比较了侧壁介电质和电性能，并与水平面上的氧化物进行了比较。开发并证明了一种数据分析方法，可以从测量的电学结果中提取侧壁介电性能。

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  • 来源
  • 会议地点 Montreal(CA);Montreal(CA)
  • 作者

    B. Wood; B. McDougall; O. Chan; A. Dent; C.-N. Ni; R. Hung; H. Chen; P. Xu; P. Nguyen; M. Okazaki; D. Mao; X. Xu; R. Ramirez; M.-P. Cai; M. Jin; W. Lee; A. Noori; M. Shek; C.-P. Chang;

  • 作者单位

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

    Applied Materials, Maydan Technology Center Group, Santa Clara, CA 95054, USA;

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  • 正文语种 eng
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