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Design, fabrication, and characterisation of fully etched TM grating coupler for photonic integrated system-in-package

机译:用于光子集成系统级封装的全蚀刻TM光栅耦合器的设计,制造和表征

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Grating couplers are the best solution for testing nano-photonic circuits. Their main benefit is that they allow access viaan optical fiber from the top and therefore there is no need to dice the chip and prepare the facets crucially. In thePLATON project
机译:光栅耦合器是测试纳米光子电路的最佳解决方案。它们的主要优点是,它们允许从顶部通过光纤访问,因此无需将芯片切成小块并准备关键的刻面。在PLATON项目中

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