Extension of Spherical Harmonic Method to RF Transient Regime

著录项

• 来源
  《Simulation of semiconductor processes and devices 1998(SISPAD98)》|1998年|42-45|共4页
• 会议地点 Leuven(BE);Leuven(BE)
• 作者

  C.-K. Lin; Neil Goldsman; C.-H. Chang; Isaak Mayergoyz; Sheldon Aronowitz; Jeffrey Dong; Nadya Belova;

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• 作者单位

  Dept. of Electrical Engineering, University of Maryland College Park, MD 20742, USA;

  Dept. of Electrical Engineering, University of Maryland College Park, MD 20742, USA;

  Dept. of Electrical Engineering, University of Maryland College Park, MD 20742, USA;

  Dept. of Electrical Engineering, University of Maryland College Park, MD 20742, USA;

  LSI Logic Corporation, Milpitas CA, USA;

  LSI Logic Corporation, Milpitas CA, USA;

  LSI Logic Corporation, Milpitas CA, USA;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 半导体器件制造工艺及设备;
• 关键词